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Three-dimensional microscope unit
LV-0383

The 3D microscope unit LV-0383 is a 3D microscope unit for the Laser Doppler Vibrometer. It can non-contact detect the vibrations of small objects occurring in three axial directions using three Laser Doppler Vibrometers and a microscope device.
With coaxial reflected illumination and two digital video cameras with different magnifications*, quick and accurate positioning and still image recording are possible.
It enables the evaluation of the three-dimensional behavior of MEMS (Micro Electro Mechanical Systems), small structures, low mass targets, and ultrasonic-driven target vibrations that are difficult to detect by contact methods.
*When the built-in camera for positioning LV-0181 is mounted on the Laser Doppler Vibrometer LV-1800.

Features

  • It is possible to detect non-contact vibrations in three axes from 0.3 Hz to 100 kHz ※1.

  •  You can position the target to be detected and the irradiated laser light while observing them simultaneously at two magnifications (fields of view) ※2. 

  • It is possible to detect small objects with a laser spot diameter of 4.5 µm.

  •  Laser Doppler Vibrometer LV-1800, LV-1710 ※3 / LV-1720 ※3 / LV-1720A ※3 are supported. 

*1 Please consult for analysis above 100 kHz
*2 When the Laser Doppler Vibrometer LV-1800 is equipped with the LV-0181 built-in positioning camera
*3 Discontinued product

  • Feature No.1
    LV-0381 image
    LV-0151B objective lens (×10) approximately 0.6 mm × approximately 0.5 mm
  • Feature No. 2
    LV-0181 (LV-1800 option)
    LV-0151B objective lens (×10)
    Approximately 2.1 mm × Approximately 1.6 mm

Case Studies

  • Evaluation of MEMS (Micro Electro Mechanical Systems)

  • Measurement of the behavior of piezoelectric elements in the shear direction.

  • Measurement of ultrasonic devices

  • Three-dimensional vibration detection of microstructural components.

System Configurations

System Configurations

For analyses above 40 kHz (sampling frequency: 102.4 kHz), please consult us.

レーザードップラー振動計 LV-1800×3

Specifications

corresponding Laser Doppler Vibrometer LV-1800, LV-1710 * / LV-1720 * / LV-1720A *
*Discontinued product
optical detection system Detector mount M22 X 0.5 length 4 mm
measured distance 38.9 mm (fixed 10 x objective lens)
spot diameter 4.5 µm

Observation device for targets

CMOS camera 1280 x 960 (USB 2.0 output)
Focusing Unit method Manual control of coarse and fine movements.
up and down stroke 30 mm
coarse movement stroke 36 mm/rotation
micro-stroke 0.2 mm/rotation
amount of overhang 100 mm
fall prevention Fall prevention ring equipment

base

material Aluminum (equipped with magnetic steel plate)
Size 310 mm X 300 mm

Radiation safety standards for laser products

Laser Safety Class Class 3R
three-dimensional optical system pinching angle 45°
Angle adjustment for pinching ±1°
Angle adjustment for pinching ±1°
expandability 2-axis two-dimensional is possible
laser focus Conducted using laser Doppler mounted on each axis.
usage environment

 

usage environment Conforming to the corresponding detector.
Weight
17 kg (excluding the sensor)

最終更新日:2022/02/01