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Three-dimensional microscope unit
LV-0383

The LV-0383 3D microscope unit is a 3D microscope unit for Laser Doppler Vibrometer. Equipped with three Laser Doppler Vibrometer and a microscope, it can non-contactly detect vibrations of minute objects occurring in three axial directions. Coaxial reflected illumination and two digital video cameras with different magnifications* enable quick and accurate positioning and still image recording.
This technology enables the evaluation of the three-dimensional behavior of vibrations in objects such as MEMS (Micro Electro Mechanical Systems), microstructures, and low-mass objects, as well as ultrasonically driven objects that are difficult to detect using contact methods.

*When the LV-0181 built-in positioning camera is attached to the LV-1800 Laser Doppler Vibrometer

Features

  • 3-axis non-contact vibration detection is possible from 0.3 Hz to 100 kHz *1.​

  •  The detection target and the irradiating laser beam can be positioned while simultaneously observing them at two magnifications (fields of view) *2. 

  • A laser spot diameter of 4.5 µm allows for the detection of minute objects.

  •  Laser Doppler Vibrometer are compatible: LV-1800, LV-1710 *3 / LV-1720 *3 / LV-1720A *3.​ 

*1 Please contact us for analysis at 100 kHz or higher.
*2 When the LV-0181 built-in positioning camera is attached to the LV-1800 Laser Doppler Vibrometer
*3 Discontinued products

Case Studies

  • Evaluation of MEMS (Micro Electro Mechanical Systems)

  • Measurement of the shear behavior of piezoelectric elements

  • Measurement of ultrasonic devices

  • Three-dimensional vibration detection of microstructures

System Configurations

System Configurations

* For analyses exceeding 40 kHz (sampling frequency: 102.4 kHz), please contact us.

レーザードップラー振動計 LV-1800×3

Specification

Compatible Laser Doppler Vibrometer LV-1800, LV-1710 * /LV-1720 * /LV-1720A *
*Discontinued products
Detection optics detector mount M22 x 0.5, Length 4 mm
Measurement distance 38.9 mm (10x fixed objective lens)
Spot diameter 4.5 µm

Target observation device

 CMOS camera 1280 x 960 (USB 2.0 output)
Focusing unit method Manual coarse and fine adjustment
Up and down stroke 30 mm
Coarse stroke 36 mm/rotation
Fine adjustment stroke 0.2 mm/rotation
Overhang amount 100 mm
Fall prevention Equipped with a fall prevention ring.

base

 material Aluminum (with magnetized steel plate attached)
size 310 mm x 300 mm

Radiation safety standards for laser products

 Laser safety class Class 3R
three-dimensional optical system Angle 45°
Adjusting the clamping angle ±1°
Adjusting the clamping angle ±1°
Scalability Two-axis, two-dimensional capability
Laser focus Performed using laser Doppler sensors mounted on each axis.
Usage environment

 

 Usage environment Complies with the corresponding detector.
Weight
17 kg (excluding attached sensors)
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最終更新日:2022/02/01