Three-dimensional microscope unit
LV-0383
The 3D microscope unit LV-0383 is a 3D microscope unit for the Laser Doppler Vibrometer. It can non-contact detect the vibrations of small objects occurring in three axial directions using three Laser Doppler Vibrometers and a microscope device.
With coaxial reflected illumination and two digital video cameras with different magnifications*, quick and accurate positioning and still image recording are possible.
It enables the evaluation of the three-dimensional behavior of MEMS (Micro Electro Mechanical Systems), small structures, low mass targets, and ultrasonic-driven target vibrations that are difficult to detect by contact methods.
*When the built-in camera for positioning LV-0181 is mounted on the Laser Doppler Vibrometer LV-1800.
