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Capacitive Micro Displacement Sensor
made-to-order
VEシリーズ

VE Series
VE Series
VE-1021
VE-2011
VE-5011

The VE Series is a micro displacement and vibration detector that can measure the distance between conductors such as metals and sensors with high precision and non-contact. It demonstrates powerful control of shaft vibration and surface sway in rotating machines such as turbines, motors, and compressors, as well as measuring and controlling the thickness and width of moving objects. It can be widely applied not only for measuring displacement but also for measuring and controlling deflection and warping amounts.

Because it is non-contact detection, it does not apply stress to rotating or vibrating objects, nor does it change vibration modes.

Measurement range Nine types of sensors are available, ranging from 20μm to 8 mm. If the measuring object is metal, you can measure without re-calibration the sensor even if the material is changed.

The VE series is used in combination with the VT-5200/VT-5700 series capacitive non-contact displacement gauges or the CL-7100 series capacitive non-contact thickness gauges.

Features

  • The measurement target is not affected by color, roughness, reflectivity, or external light.

  • Since it is measured non-contact, it does not affect the object being measured.

  • The sensor has a simple structure, excellent durability, and a wide range of applicable conditions.

  • If the measurement target is a conductor, it can be measured without recalibration even if the material is changed.
     (In addition to metals, measurement is possible for silicon, carbon, water surface, etc.) 

System Configurations

Composition No.1

The VE series sensors are used in combination with the VT-5200/VT-5700 series dedicated converters or the CL-7100 series capacitive non-contact thickness gauges. The measurement target and measurement accuracy vary depending on the converter/thickness gauge used. For details, please refer to each product page.

＊The VE series sensors correct for individual deviations with the converter. Therefore, the sensors and converters are calibrated one-to-one. If replacing with other sensors (including the same type), recalibration is necessary.

Composition No.2

Case Studies

measurable things

Measurements can be taken if the material of the object being measured is a conductor. Examples of conductors include the following.

metal plate Metals such as iron, aluminum, stainless steel, etc.
silicon wafer It can be measured in the same way as a metal plate.
copper foil substrate You can measure the thickness of a double-sided copper foil substrate before etching.
paste-like substance Paste-like substances such as electrode plates of batteries before firing.
carbon-based board Materials that contain a high amount of carbon-based substances, such as gasket materials.

Things that require caution in measurement.

alumite Anodized aluminum plates have an insulating film on the surface, which can lead to unstable measurements.
painted object When insulating paint is applied, the measurement values will contain errors.
round things VE sensors are based on the assumption of measuring flat surfaces, so errors may occur in the case of curved surfaces.
something with a rough surface When measuring rough surfaces, the measurements will be thinner compared to those taken with contact-type measuring instruments.
Measurements taken with this device will be approximately averaged over the surface irregularities. Additionally, if the surface is very rough, it may not be possible to take measurements.
porous material If the object being measured is porous, it may be measured as thin depending on its porosity.

Measurement of Insulators

If the object to be measured is an insulator, by adding the CL-0740 insulating measurement function option to the CL-7100 series capacitive non-contact thickness gauge, the thickness of insulators (such as glass, sapphire, quartz, plastic, and plastic film) can also be measured with high precision.

Specification

standard type

Model name VE-5010 VE-1020 VE-1520 VE-3020 VE-8020
Measurement range (μm) ※1 50～500 100～1000 150～1500 300～3000 800～8000
Dimensions (mm) ※2 ⌀6

VE-5010

 ⌀8

VE-1020

 ⌀10

VE-1520

 ⌀20

VE-3020

 ⌀40

VE-8020


(Retaining part ⌀20)
cable length 1.5m (cable integrated type) Separate sale VL-1520/VL-1521 cable (1.5m)
Operating temperature range ※3 0～+80 ℃

Common clamp shape type, ⌀10mm

Model name VE-2011 VE-5011 VE-1021 VE-8021
Measurement range (μm) ※1 20～ 200 50～500 100～1000 800～8000
External dimensions of the measuring section (mm) ※2 ⌀3
(retention part ⌀10)

VE-2011

 ⌀6
(retaining part ⌀10)

VE-5011

 ⌀8
(retention part ⌀10)

VE-1021

 ⌀40
(holding part ⌀10)

VE-8021
cable length Separate sale VL-1520/VL-1521 cable (1.5m)
Operating temperature range ※3 0～+80 ℃

*1 The measurement range refers to the maximum gap from the sensor end face to the measurement target.
*2 The measurement surface of the measurement target requires an area larger than the sensor outer diameter.
*3 The operating temperature range refers to the temperature range in which the sensor can function, and it is not the temperature range where linearity is guaranteed. To ensure linearity, please use at a temperature of +23 ℃ ±2 ℃. For the temperature characteristics of the VE series, please refer to the following.

signal cable sold separately

VL-1520 (Straight type connector at both ends) VL-1520 (both ends straight type connector)
VL-1521 (L type connector - straight type connector) VL-1521 (L type connector - straight type connector)

Temperature characteristics

ΔD≒ (K1×l + K2×D) Δt

K1 Thermal expansion coefficient of sensor housing material (1.7×10-5)
K2 Thermal expansion coefficient of sensor electrode material (3.4×10-5)
l Distance between the sensor surface and the fixed point.
Δt Temperature change
D measurement gap
ΔD Output change of the converter

Temperature characteristics
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最終更新日:2025/12/23