Skip to content

Select your region & language

Global

Region

High-resolution linear gauge sensor
GS-3813B/GS-3830B

The GS-3813B/GS-3830B is a submicron linear gauge sensor that features durable bearings and IP66G dust and water resistance, making it a high-resolution linear gauge sensor suitable for inline measurement using automated machinery.
By adopting ball spline bearings and developing a new optical system, it has become possible to achieve both high resolution and environmental resistance.
Since the detection signal can be extracted with a square wave output (line driver output), it can be connected directly to a PLC.
To use the GS-3813B/GS-3830B linear gauge sensors, the DG-5100 digital gauge counter is required.

Features

High resolution
1 µm → 0.1 µm

Protection rating: IP66G
It achieves not only dustproof and waterproof properties, but also oil resistance.

Significantly improved bearing life and environmental resistance.
Despite being a high-resolution type, it is also suitable for use in automated machinery.
Bearing life: 500 cycles → 15 million cycles
・Vibration resistance 98 → 196 m/s 2
- Shock resistance: 980 → 1960 m/s 2

Case Studies

High-precision dimensional measurement of glass components used in optical systems such as lasers.

Glass components for laser equipment, etc., undergo dimensional inspection using a contact-type high-precision linear gauge during the polishing process to ensure accuracy in the intermediate stages before being sent to the final optical inspection stage.

  • High-precision dimensional measurement of glass components used in optical systems such as lasers.

Measurement of silicon wafer thickness with an accuracy of 1 µm.

Using a high-precision linear gauge sensor, the thickness of silicon wafers is measured with an accuracy of 1 µm. For small wafers of 4 inches or less, the ST-0230 gauge stand can be used.

  • Measurement of silicon wafer thickness with an accuracy of 1 µm.

High-precision thickness measurement of warped materials such as silicon wafers

This device accurately measures the thickness of warped, plate-like materials such as silicon wafers. To avoid being affected by warping, it uses a special stand with a structure in which the point where the GS-3813B gauge sensor probe makes contact is supported by a "convex lens," and the other four points are supported by pins.
By aligning the center of the GS-3813B gauge sensor's probe with the center of the convex lens, thickness can be measured with virtually no influence from warping. Measurement data can be imported to a PC via an RS-232C interface for secondary processing such as statistical analysis.

  • High-precision thickness measurement of warped materials such as silicon wafers

Specification

  GS-3813B GS-3830B
Measurement range 13 mm 30 mm
Adaptive Gauge Counter DG-5100
Resolution 0.1 µm
Indication accuracy (at 20°C) 1 µm
Maximum response speed *1 300 mm/s (1.2 m/s)
Measuring force (downward) *2 2.3 N or less 2.7 N or less
Measurement force adjustment range (optional) *2 0.9–2.3 N 1.6–2.2 N
Measurement force adjustment range (optional) *3 2.7–3.0 N (Not allowed)
Number of sliding cycles (according to our company's conditions) 15 million times
Protection level (excluding connector portion) IP66G
Stem diameter ⌀15 mm+0 -0.009
Power supply DC 4.5–5.5 V
Current consumption (when supplied with DC 5V) 150 mA or less
Signal output (when supplied with DC 5V) 90° phase difference differential square wave RS422A compliant line driver output (equivalent to 26C31)
Vibration resistance (when not energized) *4 196 m/ s², 3 axes, each direction (75 minutes each), 10 Hz to 150 Hz sweep, 10 cycles.
Shockproof (when not powered on) *4 1960 m/s 2 3 axes in each direction ±X, Y, Z 3 times each Half sine wave Action time 6 ms
Operating temperature range 0 to 40 degrees Celsius
Storage temperature range -10 to 55°C
Cable length Approximately 5 m
Mass (including cables and connectors) Approximately 350g Approx. 420g
Outline drawings Outline drawings
Accessories Instruction manual, wrench
price    
Option
  • AA-969 Finger Lift
  • ST-0230, ST-044B Gauge Stand
  • AA-4104 (13 mm) / AA-4105 (30 mm) Replacement dustproof rubber
  • AA-844 (30 mm) / AA-845 (50 mm) Extension Spindle
  • Various measuring probes
  • AA-3310 Mounting Bracket
  • AA-8901 (5 m) / AA-8902 (10 m) / AA-8903 (20 m) / AA-8904 (30 m) Extension Cable
Signal Cables and Accessories

*1 When using our gauge counter, the values in parentheses represent the electrical response speed when using the DG-5100.
*2 The spindle may not fully retract when used horizontally (below 10°C) or vertically.
*3 This is the range of modifications made when modifying the device to enable upward use. (The values represent the measurement force when the device is facing downwards.)
*4 Vibration and shock resistance during measurement are not guaranteed to be the stated values.
* Cutting or modifying the signal cable midway will result in non-compliant CE marking.

Inquire about this product

Download

Outline Drawings

Related product: GS-3813B

Outline Drawings

Related product: GS-3830B

Outline Drawings

最終更新日:2025/09/03