Skip to main content

Select your region & language

Global

Region

High-resolution linear gauge sensor
GS-3813B/GS-3830B

The GS-3813B/GS-3830B is a submicron linear gauge sensor that features durable bearings and IP66G dust and drip-proof performance, making it a high-resolution linear gauge sensor suitable for inline measurement by automatic machines.

By adopting ball spline bearings and developing a new optical system, it has become possible to achieve both high resolution and environmental resistance.

With a rectangular wave output (line driver output), the detection signal can be extracted, allowing for direct connection to a PLC.

To use the GS-3813B/GS-3830B linear gauge sensor, the DG-5100 digital gauge counter is required.

Features

High Resolution
1 µm → 0.1 µm

Protection Structure IP66G
Achieves not only dustproof and waterproof but also oil resistance

Significantly Improved Bearing Life and Environmental Resistance
Compatible with use in automatic machines despite being a high-resolution type
・Bearing life Sliding count 500 → 15 million times
・Vibration resistance 98 → 196 m/s 2
・Shock resistance 980 → 1960 m/s 2

Case Studies

High-precision dimensional measurement of glass components used in optical systems such as lasers.

Glass components for laser equipment undergo dimensional inspection using contact-type high-precision linear gauges during the polishing process, ensuring accuracy in the intermediate stages before being sent to the final optical inspection stage.

  • High-precision dimensional measurement of glass components used in optical systems such as lasers.

Thickness measurement of silicon wafers with an accuracy of 1 µm.

Using a high-precision linear gauge sensor, the thickness of silicon wafers is measured with an accuracy of 1 µm. For small wafers under 4 inches, the ST-0230 gauge stand can be utilized.

  • Thickness measurement of silicon wafers with an accuracy of 1 µm.

High-precision thickness measurement of warped materials such as silicon wafers.

We measure the thickness of flat materials with warping, such as silicon wafers, with high precision. To avoid the influence of warping, we use a special stand that supports the part where the GS-3813B gauge sensor's measuring tip contacts with a "convex lens" and pins at four other points.
By aligning the center of the GS-3813B gauge sensor's measuring tip with the center of the convex lens, we can measure the thickness with minimal influence from warping. The measurement data can be imported into a computer via the RS-232C interface, allowing for secondary processing such as statistical analysis.

  • High-precision thickness measurement of warped materials such as silicon wafers.

Specification

  GS-3813B GS-3830B
Measurement range 13 mm 30 mm
Adaptation Gauge Counter DG-5100
Resolution 0.1 µm
Indication accuracy (at 20 °C) 1 µm
Maximum response speed ※1 300 mm/s (1.2 m/s)
Measurement power (downward) ※2 2.3 N or less below 2.7 N
Measurement power change range (optional) ※2 0.9 to 2.3 N 1.6 to 2.2 N
Measurement power change range (optional) ※3 2.7 to 3.0 N not possible
Number of sliding occurrences (according to our company's conditions) 15 million times
Protection level (excluding the connector part) IP66G
stem diameter ⌀15 mm+0 -0.009
Power supply DC 4.5 to 5.5 V
Current consumption (when supplied with DC 5V) below 150 mA
Signal output (when powered by DC 5V) 90° phase difference differential rectangular wave, RS422A compatible, line driver output (equivalent to 26C31)
Vibration resistance (non-energized) ※4 196 m/s 2 in each direction of the 3 axes (75 minutes each) sweep from 10 Hz to 150 Hz 10 cycles
Impact resistance (non-powered) ※4 1960 m/s 2 in each direction of the 3 axes ±X, Y, Z each 3 times, half sine wave, action time 6 ms
Operating Temperature Range 0 to 40 °C
Storage Temperature Range -10 to 55 °C
cable length approximately 5 meters
mass (including cables and connectors) approximately 350 g approximately 420 grams
Outline Dimensions Outline Dimensions
Accessories Instruction manual, wrench
Price    
Option
  • AA-969 Finger Lift
  • ST-0230, ST-044B Gauge Stand
  • AA-4104 (13 mm) / AA-4105 (30 mm) replacement dust-proof rubber
  • AA-844 (30 mm) / AA-845 (50 mm) Extended Spindle
  • Various measuring instruments
  • AA-3310 mounting bracket
  • AA-8901 (5 m) / AA-8902 (10 m) / AA-8903 (20 m) / AA-8904 (30 m) Extension Cable
Signal Cables and Accessories

*1 When using our gauge counter, the values in parentheses are the electrical response speeds when using the DG-5100.
*2 When used horizontally (below 10°C), the spindle may not fully return when used upwards.
*3 This is the range of changes during modifications that allow for upward use. (The values are the measuring forces when used downwards)
*4 The vibration and shock resistance during measurement do not guarantee the stated values.
* Signal cable interruption or modifications will result in non-compliance with CE marking.

Inquire about this product.

Download

Outline Drawings

最終更新日:2025/09/03