Overview of Non-Contact Thickness Meter and Related Products
Using a capacitive micro-displacement sensor (gap detector) with high stability, we achieve non-contact and high-precision thickness measurement. By combining nine types of sensors that can be selected according to the measurement target and the shape of the measured object, along with thickness gauges (CL series) and displacement gauges (VT series), an optimal system tailored to the application can be constructed.
It demonstrates its power in measuring axial vibrations and surface contact of rotating shafts such as turbines, electric motors, compressors, and machine tool spindles, as well as measuring and controlling the thickness and width of moving objects. A wide range of applications centered on measurement control, including measuring and monitoring displacement, deflection, and warpage, is possible.
| VE-5010 VE Series Sensor (Integrated Cable Type) | VE-1020 VE Series Sensor (Cable Integrated) | VE-1520 VEシリーズ センサー |
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| Features Measurement range : 50 ～ 500 μm Outer diameter : Φ6 Cable length : 1.5 m |
Features Measurement range ： 100 ～1000 μm Dimensions ： Φ8 Cable length ： 1.5 m |
Features Measurement range : 150 ～1500 μm Dimensions : Φ10 Cable (optional) : VL-1520/1521 (1.5 m) |
| VE-3020 VEシリーズ センサー | VE-8020 VEシリーズ センサー | |
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| Features Measurement range ： 300 ～3000 μm Dimensions ： Φ20 Cable (optional) ： VL-1520/1521 (1.5 m) |
Features Measurement range : 800 ～8000 μm Outer diameter : Φ40 Cable (optional) : VL-1520/1521 (1.5 m) |
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| Compatible Measuring Instruments VT-5200/VT-5700, CL-7100/CL-7100S |
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| VE-2011 VEシリーズ センサー | VE-5011 VEシリーズ センサー | VE-1021 VEシリーズ センサー |
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| Features Measurement range: 20 ～200 μm Dimensions: Φ3 (tip) Cable (optional): VL-1520/1521 (1.5 m) |
Features Measurement range: 50 ～500 μm Dimensions: Φ6 (tip) Cable (optional): VL-1520/1521 (1.5 m) |
Features Measurement range: 100 ～1000 μm Dimensions: Φ8 (tip) Cable (optional): VL-1520/1521 (1.5 m) |
| VE-8021 VEシリーズ センサー | ||
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| Features Measurement range: 800 ～8000 μm Dimensions: Φ40 Cable (optional): VL-1520/1521 (1.5 m) |
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| Compatible Measuring Instruments VT-5200/VT-5700, CL-7100/CL-7100S |
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Measurement Example 1: Film (Insulator) Thickness Monitoring
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block diagram
| CL-7100 Non-Contact Thickness Meter | CL-7100S Non-Contact Thickness Meter (sensor amplifier separate type) |
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CL-0710 Sensor Amplifier
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| Measurement Items Thickness: Thickness of the measured object (conductor/semiconductor) Gap A: Gap between sensor A and the measured object Gap B: Gap between sensor B and the measured object A-B: Step, parallelism (A-B) Thickness: Thickness of the measured object (insulator) ※When CL-0740 insulator measurement function is equipped Temperature: Temperature ※When CL-0741 temperature measurement and correction function is equipped |
Measurement Items Thickness: Thickness of the measured object (conductor/semiconductor) Gap A: Gap between sensor A and the measured object Gap B: Gap between sensor B and the measured object A-B: Step, parallelism (A-B) Thickness: Thickness of the measured object (insulator) ※When CL-0740 insulator measurement function is equipped Temperature: Temperature ※When CL-0741 temperature measurement and correction function is equipped |
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Option
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Options
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Compatible Sensor |
Compatible Sensor VE Series |
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The VT series includes the AC-only VT-5200 series (suitable for laboratories and research) and the DC±15V dedicated compact VT-5700 series (for line and embedded use).
Additionally, the output response frequencies are available at 4kHz and 10kHz, so please choose according to your application.
| VT-5210 Non-Contact Displacement Meter (4 kHz) | VT-5220 Non-Contact Displacement Meter (10 kHz) | VT-5710 Non-Contact Displacement Meter (4 kHz) |
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| Features Output: 0 to 5 V / 0 to 100 %F.S. Linearity: ±0.2 %F.S. / 10 to 100 %F.S. Response frequency: DC to 4 kHz Monitor display: 20-segment LED Analog output offset function |
Features Output: 0 to 5 V / 0 to 100 %F.S. Linearity: ±0.25 %F.S. / 10 to 100 %F.S. Response frequency: DC to 10 kHz Monitor display: 20-segment LED Analog output offset function |
Features Output: 0 to 5 V / 0 to 100 %F.S. Linearity: ±0.2 %F.S. / 10 to 100 %F.S. Response frequency: DC to 4 kHz Monitor display: 10-segment LED |
| Power supply AC 100-240 V / 10 VA |
Power supply DC ± 15 V / 100 mA |
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| VT-5720 Non-Contact Displacement Meter (10 kHz) | ||
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| Features Output: 0 to 5 V / 0 to 100 %F.S. Linearity: ±0.25 %F.S. / 10 to 100 %F.S. Response frequency: DC to 10 kHz Monitor display: 10-segment LED |
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| Power supply DC ± 15 V / 100 mA |
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| Compatible Sensor VE Series | ||
| VL-1520 Cable Length 1.5m (Straight Type Connector at Both Ends) |
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| VL-1521 Cable length 1.5m (L-shaped connector - straight type connector) |
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