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Capacitive Non-contact Thickness Gauge
NEW Made to order
CL-7100シリーズ

The "CL-7100 series," which was introduced as the successor to the long-selling "CL-5610 series," has significantly enhanced measurement accuracy and response performance.
It also includes new features such as temperature measurement and Ethernet communication.
Compatible with various materials such as silicon wafers, electromagnetic steel sheets, and films for EV batteries, it achieves high-precision thickness measurement and streamlining of inspection processes through combinations with a variety of displacement sensors.

Features

non-contact measurement

Achieves high reproducibility without physically affecting the measurement target.

High precision and high response measurement performance

Compared to conventional products, it enables more precise measurements (±0.05 %FS to ±0.12 %FS, depending on the combination with sensors), and the computation cycle has been shortened from 20 ms to 10 ms. It supports multi-point continuous measurements and high-speed lines, achieving both reduced inspection time and high-quality measurements simultaneously.

Temperature measurement and correction function, network collaboration (optional)

The PT-100 temperature sensor enables the measurement of environmental temperature. By acquiring temperature data simultaneously with thickness measurement, it corrects measurement errors due to temperature changes, achieving higher precision measurements.
Furthermore, it supports Ethernet communication, facilitating centralized management, data collection, and remote monitoring via the network.

Intuitive color LCD touchscreen display

The color LCD display with excellent visibility and an easy-to-understand menu structure allows for quick access to necessary information. Measurement data for up to four items, such as displacement, thickness, and temperature, can be displayed simultaneously on one screen. This enables quick understanding of the measurement situation as multiple pieces of information can be checked at once without screen switching.
It also supports hard key operation, allowing for reliable and comfortable operation in various field environments, even while wearing gloves.

Compact, lightweight, and low power consumption.

The compact and lightweight design has achieved a reduction in both volume and mass by approximately 50% compared to conventional models. Additionally, the low power consumption helps to reduce environmental impact and contributes to the realization of carbon neutrality.

The comparator function (when options CL-0731 or CL-0732 are attached) can be used for online monitoring of abnormal values.

measured object Conductor; Semiconductor insulator
Silicon wafers, steel plates, aluminum plates, hard disks, printed circuit boards, and other metal plates that require cleanliness, softness, mirror finish, and are prone to scratches. Plastics such as glass, polyethylene, and polypropylene.
(Thin objects composed of a single material with uniform properties are the subject of measurement.)

For inquiries regarding measurements of intermediate materials and composite materials, please contact us in addition to the measurement samples mentioned above.

System Configurations

  • System Configurations

Specification

measurement method

  • In the case of measuring conductors and semiconductors.

    In the case of measuring conductors and semiconductors.

    Install two sensors and the measured object parallel to each other within the measurement range of the sensors, and set the sensor spacing (Gs) to the CL-7100 series. Insert the measured object between sensor A and B, measure the gaps to the measured object (Ga, Gb), and determine the thickness (t).

  • In the case of measuring an insulator (optional)

    In the case of measuring an insulator (optional)

    Install the sensor and conductor (reference floor) in parallel, and set the sensor's gap measurement value (the voltage output Gs at this time) to the CL-7100 series. When the object to be measured is inserted between the sensor and the conductor (reference floor), the sensor's voltage output becomes Ga, and the thickness (t) is determined from this change in sensor voltage and the relative permittivity ε r.

Outline Specifications

Measurement items Thickness: Thickness of the measured object【Conductor/Semiconductor/Insulator ※】※When equipped with CL-0740 insulation measurement function
Gap A: The gap between Sensor A and the measurement target (conductors/semiconductors only)
Gap B: The gap between Sensor B and the measurement target (only for conductors/semiconductors)
A-B (Difference between Sensor A and B): Height difference, Parallelism (A-B) [Conductors/Semiconductors only]
Temperature: When the CL-0741 temperature measurement and correction function is equipped.
Suitable Sensor and Display Resolution   sensor Resolution
standard VE-2011/VE-5011/VE-1021
VE-5010/VE-1020		 0.1 µm
VE-1520 0.5 µm
VE-3020
VE-8020/VE-8021		 1.0 µm
When equipped with high-resolution computing functions. VE-2011 0.02 µm
VE-5010/ VE-5011 0.05 µm
※When equipped with CL-0722 VE measurement range change function: 0.02 µm
VE-1020/ VE-1021 0.1 µm
VE-1520 0.2 µm
VE-3020
VE-8020/VE-8021		 0.5 µm
measurement accuracy   sensor accuracy
standard VE-5010/VE-1020/VE-1520/VE-3020/VE-8020/
VE-2011/VE-5011/VE-1021/VE-8021		 ± 0.15 % FS
When equipped with high-resolution computing functions. VE-2011 ± 0.12 % FS
VE-5010/VE-5011 ± 0.10 % FS
VE-1020/VE-1021/VE-1520/VE-3020/VE-8020/
VE-8021		 ± 0.05 % FS
sensor input cable VL-1520 (1.5 m straight connector at both ends) / VL-1521 (1.5 m L-shaped to straight connector)
Display Section 4.3-inch touch panel color LCD
up to 4 items can be displayed
Remote Signal Output output method 1 Make contact output (a contact output)
Function input signal START/STOP/PAUSE/CALIB
output signal

  • Select from calculation state or error state.

  • +5 V voltage output
Compatible Connectors ER03-PB8M (Tajimi Wireless Manufacturing)
Interface RS-232C, Ethernet (optional CL-0751)
General Specifications Power Supply AC 100 to 240 V ±10%, 50/60 Hz, power consumption: 36 VA or less.
Outline Dimensions 210(W) × 99(H) × 150(D) mm (excluding protrusions)
Weight 約1.6 kg
Operating Temperature Range 0 ℃～ 40 ℃
Storage Temperature Range –10 ℃～ 50 ℃
Operating Humidity Range 20% to 85% (without condensation)
Storage Humidity Range 20% to 85% (without condensation)
warm-up time more than 40 minutes
Electric Shock Protection Class 1 (3 pins)
Overvoltage category Ⅱ
usage environment Indoor use (laboratory / factory)
To be used at an altitude of 2,000 m or below.
Contamination level: 2
Applicable Standards RoHS standards EN IEC 63000
safety standards EN 61010-1
Accessories

  • AC power cable

  • Remote connector (Tajimi Wireless: ER03-PB8M)

  • Instruction Manuals
CL-7100S accessories CL-0710 Sensor Amplifier Outline Dimensions 81(W) mm × 48(H) mm × 35(D) mm (excluding protrusions)
Weight 約210 g
Dedicated cable (2.5 m) *Up to 10 m (optional)

Option

High Resolution Computational Function

This is a feature that improves resolution and measurement accuracy. Please refer to the outline specifications for details.

High Impedance Grounding Mode

Stable measurements can be performed even under conditions of high grounding resistance.

CL-0722 VE Measurement Range Change

The measurement range of VE-5010 and VE-5011 will be changed. Please refer to the general specifications for details.

CL-0730 Analog Output Function

Number of output points 3
Output Items Select from Thickness/Gap A/Gap B/A-B/Temperature *Deviation selection possible
output range ± 5 V
load resistance more than 100 k ohms
Accuracy (Linearity) ± 0.2 % of Full Scale
update cycle 10 ms
※Gap A/Gap B moving average setting　　only for one time: 0.1 ms
Compatible Connectors C02 Type (BNC)

Comparator Output Function

Number of output points 3
output method 1 Make contact output (a contact output)
Contact capacity Maximum 60 V AC/DC, maximum 400 mA (resistive load)
Operation mode Select from individual mode / linked mode.
Individual mode Measurement items and upper and lower limits can be set independently for each port.
Linked Mode

  • If the measured value is greater than the upper limit, Port 1 is OPEN.

  • If the measured value is below the upper limit and above the lower limit, Port 2 is OPEN.

  • If the measured value is below the lower limit, port 3 is OPEN.
Output Items Individual mode Select from OFF/Thickness/Gap A/Gap B/A-B/Error
Linked Mode Select from OFF/Thickness/Gap A/Gap B/A-B
judgment interval 10 ms
Compatible Connectors MC 1,5/6-STF-3,81–1827745 (manufactured by Phoenix Contact)

CL-0732 Analog Comparator Output Function

This is an option that can add both analog output and comparator output functions.

High-speed response function for analog output

This software sets the rise time constant of the analog output to less than 5 ms.
※It is available for use when equipped with CL-0730 or CL-0732.

CL-0740 Insulator Measurement Function

This is a function that enables the measurement of the thickness of an insulator.

Temperature Measurement and Correction Function

Compatible sensor Pt100 temperature resistance sensor 3-wire type
Measurement range 0 ℃～ 200 ℃
display resolution 0.1 ℃
measurement accuracy ± 0.3 % FS (excluding sensor accuracy)
update cycle below 200 ms
excitation current approximately 1 mA
Compatible Connectors M4 screw terminal connection

CL-0750 BCD output function

output method 6-digit parallel BCD, open collector
Output Items

  • Measurement items: Thickness/Gap A/Gap B/A-B

  • Calculation: Instant / Max / Min / Range

  • Deviation: OFF/ON

Select from the above combination or Display 1/2/3/4.
output update cycle 10 ms
Compatible Connectors HDRA-E36MA (manufactured by Honda Communication Industry)
suitable cable AA-8207 (3 m / one side open)

CL-0751 Ethernet communication function

transmission method 10BASE-T/100BASE-TX automatic selection
communication protocol TCP/IP（IPv4）
Electrical Specifications IEEE802.3 compliant
Function Command control and data transfer via a dedicated port (socket communication)
Compatible Connectors RJ-45

CL-015 Wafer Slide Table Made to Order

CL-015 is a simple manual slide table that combines with the CL-7100 and VE sensor (holding part ⌀10) to non-contact measure the thickness of semiconductor and conductor wafers, such as silicon wafers. The surface of the table is grooved to make it easier to use vacuum suction tweezers.

CL-015 Slide Table for Wafers
CL-015 Slide Table for Wafers

Target wafer Outer diameter: 100 to 150 mm Thickness: 0.1 to 1 mm
Additionally, custom tables can be made for 200 mm, 300 mm, etc.

VE Series Capacitive Gap Detector

standard type

Model name VE-5010 VE-1020 VE-1520 VE-3020 VE-8020
Measurement range (μm) ※1 50～500 100～1000 150～1500 300～3000 800～8000
Dimensions (mm) ※2 ⌀6 ⌀8 ⌀10 ⌀20 ⌀40
cable length 1.5 m (cable-integrated) Separate sale VL-1520/VL-1521 cable (1.5 m)
Operating temperature range ※3 0～+80 ℃

Common clamp shape type, ⌀10 mm

Model name VE-2011 VE-5011 VE-1021 VE-8021
Measurement range (μm) ※1 20～ 200 50～500 100～1000 800～8000
Dimensions (mm) ※2 ⌀3 ⌀6 ⌀8 ⌀40
cable length Separate sale VL-1520/VL-1521 cable (1.5m)
Operating temperature range ※3 0～+80 ℃

*1 The measurement range refers to the maximum gap from the sensor end face to the measurement target.
*2 The measurement surface of the measurement target requires an area larger than the sensor outer diameter.
*3 The operating temperature range refers to the temperature range in which the sensor can function, but it is not the temperature range in which linearity is guaranteed.
To ensure linearity, please use at a temperature of +23 ℃ ±2 ℃.

Signal cable

VL-1520 Cable length 1.5m
(Straight type connector at both ends)		 Signal Cable No. 1
VL-1521 Cable length 1.5m
(L-shaped connector - straight type connector)		 Signal Cable No. 2
Inquire about this product.

最終更新日:2025/12/17