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Features

Non-contact measurement

It achieves high reproducibility without physically affecting the object being measured.

High-precision, high-response measurement performance

Compared to conventional products, it enables more accurate measurements (±0.05 %FS to ±0.12 %FS, depending on the sensor combination), and the calculation cycle has been shortened from 20 ms to 10 ms. It supports multi-point continuous measurement and high-speed lines, achieving both reduced inspection time and high-quality measurements simultaneously.

Temperature measurement and correction function, network connectivity (optional)

The PT-100 temperature sensor now enables measurement of ambient temperature. By acquiring temperature data simultaneously with thickness measurement, measurement errors caused by temperature changes are corrected, resulting in more accurate measurements.
Furthermore, it supports Ethernet communication, enabling centralized management, data collection, and remote monitoring via the network.

Intuitive-to-use color LCD touch panel display

With its highly visible color LCD display and user-friendly menu structure, you can quickly access the information you need. Up to four measurement data points, such as displacement, thickness, and temperature, can be displayed simultaneously on a single screen. Because you can check multiple pieces of information at once without switching screens, you can quickly grasp the measurement status.
It also supports hard key operation, allowing for reliable and comfortable operation in various work environments, even while wearing gloves.

Miniaturization, weight reduction, and low power consumption

Thanks to its compact and lightweight design, both volume and weight have been reduced by approximately 50% compared to conventional models. Furthermore, reduced power consumption minimizes environmental impact and contributes to achieving carbon neutrality.

The comparator function (when the CL-0731 or CL-0732 option is installed) allows for online monitoring of abnormal values.

Object to be measured Conductors and Semiconductors insulator
Silicon wafers, steel plates, aluminum plates, hard disks, printed circuit boards, and other metal plates that require cleanliness, are soft, have a mirror finish, or are easily scratched. Glass, polyethylene, polypropylene, and other plastics.
(The objects to be measured are thin objects made of a single material with uniform properties throughout.)

*For measurements of intermediate materials and composite materials in addition to the measurement samples shown above, please contact us.

System Configurations

  • System Configurations

Specification

Measurement method

  • When measuring conductors and semiconductors

    When measuring conductors and semiconductors

    Two sensors and the object to be measured are placed parallel to each other within the sensor measurement range, and this sensor spacing (Gs) is set in the CL-7100 series. The object to be measured is inserted between sensors A and B, and the gap (Ga, Gb) between each sensor and the object is measured to determine the thickness (t).

  • When measuring an insulator (optional)

    When measuring an insulator (optional)

    The sensor and conductor (reference floor) are set parallel to each other, and the gap measurement value of the sensor (voltage output Gs at this time) is set in the CL-7100 series. When the object to be measured is inserted between the sensor and the conductor (reference floor), the sensor's voltage output becomes Ga, and the thickness (t) is determined from this change in sensor voltage and the relative permittivity εr.

Outline specifications

Measurement items Thickness: Thickness of the object being measured [Conductor/Semiconductor/Insulator*] *When CL-0740 has an insulator measurement function.
Gap A: The gap between sensor A and the object being measured [Conductors/semiconductors only]
Gap B: The gap between sensor B and the object being measured [Conductors/semiconductors only]
AB (Difference between sensors A and B): Step difference, parallelism (AB) [Conductors/semiconductors only]
Temperature: Temperature *When CL-0741 temperature measurement and correction function is installed.
Compatible sensors and display resolution   sensor Resolution
standard VE-2011/VE-5011/VE-1021
VE-5010/VE-1020		 0.1 µm
VE-1520 0.5 µm
VE-3020
VE-8020/VE-8021		 1.0 µm
CL-0720 When equipped with high-resolution calculation function VE-2011 0.02 µm
VE-5010/ VE-5011 0.05 µm
*When CL-0722 VE measurement range change function is installed: 0.02 µm
VE-1020/ VE-1021 0.1 µm
VE-1520 0.2 µm
VE-3020
VE-8020/VE-8021		 0.5 µm
Measurement accuracy   sensor accuracy
standard VE-5010/VE-1020/VE-1520/VE-3020/VE-8020/
VE-2011/VE-5011/VE-1021/VE-8021		 ± 0.15 % FS
CL-0720 When equipped with high-resolution calculation function VE-2011 ± 0.12 % FS
VE-5010/VE-5011 ± 0.10 % FS
VE-1020/VE-1021/VE-1520/VE-3020/VE-8020/
VE-8021		 ± 0.05 % FS
Sensor input cable VL-1520 (1.5 m, straight connectors on both ends) / VL-1521 (1.5 m, L-shaped to straight connector)
Display section 4.3-inch touchscreen color LCD
Up to 4 items can be displayed
Remote signal output Output method 1. Make contact output (a contact output)
Function Input signal START/STOP/PAUSE/CALIB
Output signal

  • Select from calculation state or error state

  • +5V voltage output
Compatible connectors ER03-PB8M (manufactured by Tajimi Musen)
Interface RS-232C, Ethernet (optional CL-0751)
General specifications Power supply AC100 to 240 V±10%, 50/60 Hz, power consumption: 36 VA or less
Outline drawings 210(W) × 99(H) × 150(D) mm (excluding protrusions)
Weight 約1.6 kg
Operating temperature range 0 ℃～ 40 ℃
Storage temperature range –10 ℃～ 50 ℃
Operating humidity range 20% to 85% (no condensation)
Storage humidity range 20% to 85% (no condensation)
Warm-up time More than 40 minutes
Electric shock protection class I (3 pins)
Overvoltage category Ⅱ
Usage environment Indoor use (laboratory / factory)
For use at altitudes below 2,000 m.
Contamination level: 2
Applicable standards RoHS standard EN IEC 63000
safety standards EN 61010-1
Accessories

  • AC power cable

  • Remote connector (manufactured by Tajimi Musen: ER03-PB8M)

  • Instruction Manual
CL-7100S Accessories CL-0710 Sensor Amplifier Outline drawings 81(W) mm × 48(H) mm × 35(D) mm (excluding protrusions)
Weight 約210 g
Dedicated cable (2.5 m) *Maximum 10 m (optional)

Case Studies

Option

CL-0720 High resolution calculation function

This function improves display resolution and measurement accuracy. Please refer to the general specifications for details.

CL-0721 High Impedance Grounding Mode

Stable measurements can be performed even under measurement conditions with high ground resistance.

CL-0722 VE measurement range change

The measurement range of the VE-5010 and VE-5011 will be changed. Please refer to the general specifications for details.

CL-0730 Analog Output Function

Number of output points 3
Output items Choose from Thickness/Gap A/Gap B/AB/Temperature. *Deviation score can be selected.
Output range ± 5 V
Load resistance 100 kΩ or more
Accuracy (linearity) Within ±0.2% FS
Update cycle 10 ms
*Gap A/Gap B Moving Average setting (1 time only): 0.1 ms
Compatible connectors C02 type (BNC)

CL-0731 Comparator Output Function

Number of output points 3
Output method 1. Make contact output (a contact output)
Contact capacity Up to 60 V AC/DC, up to 400 mA (resistive load)
Operating mode Select from Individual Mode / Linked Mode
Individual Mode Each port can independently set measurement items and upper/lower limits.
Linked mode

  • If the measured value is greater than the upper limit, port 1 will be OPEN.

  • Port 2 opens if the measured value is below the upper limit or above the lower limit.

  • Port 3 opens if the measured value is below the lower limit.
Output items Individual Mode Select from OFF/Thickness/Gap A/Gap B/AB/Error
Linked mode Choose from OFF/Thickness/Gap A/Gap B/AB
Judgment interval 10 ms
Compatible connectors MC 1,5/6-STF-3,81–1827745 (manufactured by Phoenix Contact)

CL-0732 Analog Comparator Output Function

This option adds both analog output and comparator output functionality.

CL-0740 Insulator Measurement Function

This function enables the measurement of the thickness of insulators.

CL-0741 Temperature measurement and correction function

Compatible sensors Resistance thermometer (Pt100) bridge type, 3-wire
Measurement range 0 ℃～ 200 ℃
Display resolution 0.1 ℃
Measurement accuracy ± 0.3 % FS (excluding sensor accuracy)
Update cycle 200ms or less
Excitation current Approximately 1 mA
Compatible connectors M4 screw terminal connection

CL-0750 BCD output function

Output method 6-digit parallel BCD, open collector
Output items

  • Measurement item: Thickness/Gap A/Gap B/AB

  • Calculations: Instant / Max / Min / Range

  • Deviation: OFF/ON

Choose from the above combinations, or from Display1/2/3/4.
Output update cycle 10 ms
Compatible connectors HDRA-E36MA (manufactured by Honda Communications Industry Co., Ltd.)
Compatible Cables AA-8207 (3 m / open on one side)

CL-0751 Ethernet communication function

Transmission method 10BASE-T/100BASE-TX automatic selection
Communication protocol TCP/IP（IPv4）
Electrical specifications IEEE 802.3 compliant
Function Command control and data transfer (socket communication) via a dedicated port.
Compatible connectors RJ-45

CL-015 Wafer Slide Table (Made to Order)

The CL-015 is a simple, manual slide table for non-contact measurement of the thickness of semiconductor and conductive wafers, such as silicon wafers, by combining the CL-7100 with a VE sensor (holding part ⌀10). The surface on which the wafer is placed has grooves to facilitate the use of vacuum suction tweezers.

CL-015 Wafer Slide Table
CL-015 Wafer Slide Table

Target wafers: Outer diameter: 100–150 mm, Thickness: 0.1–1 mm
In addition, we can manufacture custom tables in other dimensions such as 200 mm and 300 mm.

VE Series Capacitive Gap Detector

Standard type

Model name VE-5010 VE-1020 VE-1520 VE-3020 VE-8020
Measurement range (μm) *1 50～500 100～1000 150～1500 300～3000 800～8000
External dimension (mm) *2 ⌀6 ⌀8 ⌀10 ⌀20 ⌀40
Cable length 1.5 m (integrated cable) Sold separately: VL-1520/VL-1521 cable (1.5 m)
Operating temperature range *3 0～+80 ℃

⌀10 mm Common Clamp Type

Model name VE-2011 VE-5011 VE-1021 VE-8021
Measurement range (μm) *1 20～ 200 50～500 100～1000 800～8000
External dimension (mm) *2 ⌀3 ⌀6 ⌀8 ⌀40
Cable length Sold separately: VL-1520/VL-1521 cable (1.5m)
Operating temperature range *3 0～+80 ℃

*1 The measurement range refers to the maximum gap from the sensor end face to the object being measured.
*2 The measuring surface of the object being measured must have an area larger than the outer diameter of the sensor.
*3 The operating temperature range refers to the temperature range in which the sensor can function, and does not refer to the temperature range in which linearity is guaranteed.
To ensure linearity, please use at a temperature of +23°C ± 2°C.

Signal cable

VL-1520 Cable length: 1.5m
(Straight-type connector on both ends)		 Signal Cable_No.1
VL-1521 Cable length: 1.5m
(L-shaped connector - straight type connector)		 Signal Cable No. 2
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最終更新日:2025/12/17