Capacitive Thickness Gauges and Displacement Gauges: Frequently Asked Questions
Question number FAQ-0143
Why is calibration using a reference sample necessary when measuring the thickness of conductors and semiconductors with a capacitive thickness gauge or displacement gauge?
The CL series of capacitive thickness gauges and displacement gauges calculates thickness from gap measurements.
Since the thickness cannot be calculated from the gap value without knowing the distance between the two sensors, calibration using a reference piece is necessary to determine the gap between the sensors.
● Flow from calibration to thickness measurement
- A reference piece is placed inside, and each sensor measures the distance (1) to that point.
- The distance between sensors (2) is determined from the thickness of the reference piece and the measurement results of the sensors.
- Insert the object to be measured and measure the distance (3).
- The thickness of the object being measured (4) is calculated from the measured distance.

The measurable thickness can be freely set by changing the sensor's fixed position. Therefore, even thick objects can be measured with high resolution.
Last updated: 2011-04-18