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Capacitance Thickness Gauge / Displacement Gauge Frequently Asked Questions

Question number FAQ-0143

Why is calibration with a reference piece necessary when measuring the thickness of conductors and semiconductors using a capacitive thickness gauge or displacement gauge?

The capacitive thickness gauge and displacement meter CL series calculates thickness from gap measurement values.
If the distance between two sensors is unknown, the thickness cannot be calculated from the gap value, so a calibration on the reference piece is needed to determine the gap between sensors.

The process from calibration to thickness measurement.

  • The sensors measure the distance (1) to the reference piece.
  • We will determine the distance between the sensors (2) from the thickness of the reference plate and the measurement results from the sensors.
  • Insert the measurement object and measure the distance (3).
  • The thickness of the measured object (4) is calculated from the measured distance.

The measurable thickness can be freely set by changing the fixed position of the sensor. Therefore, it is possible to measure even thick objects with high resolution.

Last updated date: 2011-04-18