Capacitive Thickness Gauges and Displacement Gauges: Frequently Asked Questions
Question number FAQ-0141
How do capacitive thickness gauges and displacement gauges measure the thickness of conductors and semiconductors?
The VE series gap detector is a sensor that measures gaps, but by using two VE sensors, it can also calculate thickness.
As shown in the diagram below, two VE sensors are placed so as to sandwich the object to be measured. The two VE sensors measure the gap values (Ga, Gb), but if the distance between the sensors (GS) is known, the thickness (t) of the object to be measured can be calculated.

The distance between VE sensors can be determined by inserting a reference piece and measuring the gap value. For more details, please refer to "Why is calibration with a reference piece necessary when measuring the thickness of conductors and semiconductors with a capacitive thickness gauge/displacement gauge?".
Last updated: 2011-04-18