Capacitance Thickness Gauge / Displacement Gauge Frequently Asked Questions
Question number FAQ-0141
How do capacitive thickness gauges and displacement gauges measure the thickness of conductors and semiconductors?
The VE series gap detector is a sensor that measures gaps, but by using two VE sensors, it can calculate thickness.
As shown in the figure below, the two VE sensors are installed to sandwich the object being measured. The two VE sensors measure the gap values (Ga, Gb), but if the distance between the sensors (GS) is known, the thickness of the object being measured (t) can be calculated.

The distance between the VE sensors can be determined by measuring the gap value with a reference piece. For more details, please refer to "Why is calibration with a reference piece necessary when measuring the thickness of conductors and semiconductors with a capacitive thickness gauge or displacement gauge?".
Last updated date: 2011-04-18