Capacitive Thickness Gauges and Displacement Gauges: Frequently Asked Questions

Question number FAQ-0150

How reproducible are the measurements obtained using capacitive thickness gauges and displacement gauges?

This shows an example of silicon wafer thickness measurement using the CL-5600 series thickness gauge. By securely holding the sample, very good measurement reproducibility can be obtained. In the case of silicon wafers, they are usually fixed to the measurement table using suction air.

Equipment used	Gap sensor: VE-1020 Thickness gauge: CL-5600 (display resolution: 0.1μm [when using VE-1020]) Measurement table: CL-015 table with vacuum suction mechanism option
Measurement sample	Silicon wafers (5 pieces)
Measurement points	Wafer center

CL-015 Wafer Slide Table
(With vacuum suction mechanism option)

Last updated: 2011-04-18