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Capacitance Thickness Gauge / Displacement Gauge Frequently Asked Questions

Question number FAQ-0150

What is the reproducibility of measurements with a capacitive thickness gauge or displacement gauge?

This shows an example of measuring the thickness of silicon wafers with the CL-5600 series thickness gauge. By securely holding the sample, very good measurement reproducibility can be achieved. In the case of silicon wafers, they are usually fixed to the measurement table using suction air.

using machines
  • Gap Sensor: VE-1020
  • Thickness gauge: CL-5600 (Display resolution: 0.1μm [when using VE-1020])
  • Measurement table: Table CL-015 with vacuum suction mechanism option
measurement sampleSilicon wafers (5 pieces)
measurement pointwafer center


CL-015 Wafer Slide Table
(with vacuum suction mechanism option)

Last updated date: 2011-04-18