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Laser length measuring system
LV-9002/LV-9300A/LV-0121A

LV-9002
LV-9002
LV-9002 / LV-9300A / LV-0121A
LV-9002 / LV-9300A / LV-0121A

The LV-9002/LV-9300A is a high-precision, high-speed response non-contact length measuring system that measures linear displacement using He-Ne laser light.

With its simple configuration incorporating an interferometer, a fast response time of 5 m/s, and high-speed sampling capabilities of up to 1 MHz, it can perform highly accurate positioning measurement and analysis for a wide range of applications, from office automation equipment such as printers, scanners, and copiers, to the dynamic characteristic analysis of machines with precision and high-speed positioning mechanisms, such as machine tools and moving stages.

By using tiny corner cubes weighing less than 0.2 g, even the smallest ultrasonic linear actuator movement can be analyzed and evaluated with unprecedented precision, minimizing errors due to mass loading.

Furthermore, using the LV-0930 displacement analysis software, the dynamic behavior of the object being measured during movement and stopping can be analyzed with a maximum sampling rate of 1 MHz. In addition to measuring the object's displacement (m), movement speed (m/s), and acceleration (m/s²), it is possible to measure overshoot and undershoot, and by using two sensors, differential and differential analysis of pitching and yawing can be performed. It is also easy to display ±% graphs that allow you to easily check what percentage of the target speed constant velocity control is within.

The laser length measuring system consists of the following three units:
LV-9002 Sensor
LV-9300A Laser Speed Meter
LV-0121A Digital Displacement Gauge
Depending on the combination, it can be configured as a 1-channel length measuring instrument or a 2-channel length measuring instrument to perform pitching and yawing or differential measurement.

Features

  • Simple structure with integrated interferometer

  • High-speed response up to 5 m/s, 1 MHz sampling.

  • The ultra-lightweight corner cubes (0.2 g / 2.0 g or less) reduce the impact of mass load.

  • When combined with the LV-0930 displacement analysis software, simultaneous conversion of [displacement → velocity → acceleration] is also easy.

LV-9002/LV-9300A/LV-0121A Introduction Video (YouTube)

Dynamic characteristics measurement of high-speed chip mounters and dispenser heads

The smallest corner cubes used in the LV-9002/LV-9300A laser length measuring instruments have a minute mass of less than 0.2 g*1. This minimizes the force generated by the corner cube's mass due to the acceleration that occurs when the object being measured is operating or stopping. This makes it possible to evaluate high-precision components such as the heads of high-speed chip mounters and dispenser devices.

  • No. 1 in dynamic characteristic measurement of high-speed chip mounters and dispenser heads.
  • Dynamic characteristics measurement of high-speed chip mounters and dispenser heads No. 2

Digital and Analog Dynamics Analysis

The LV-9002/LV-9300A/LV-0121A features digital data analysis using the LV-0930 displacement analysis software, as well as an analog displacement output with 1 MHz sampling. This allows for synchronized evaluation of displacement values (m) of the working parts with other detectors such as measurement microphones, acceleration detectors, and current probes attached to the object being measured and evaluated.

  • Digital and Analog Dynamics Analysis

Pitching and Yaw Measurement

By using two laser length measuring sensors, it is possible to evaluate slight differences in angle, displacement, velocity, and acceleration that occur during pitching and yawing in stage operation. Differential evaluation with any arbitrary part is also possible.

  • Pitching measurement using two LV-9002 laser length measuring sensors in a two-axis configuration.
    Pitching measurement using two LV-9002 laser length measuring sensors in a two-axis configuration.

System Configurations

System Configurations

音響振動解析システム O-Solution DS-5000 FFTアナライザー CF-9200A / CF-9400A データレコーダー DR-7100 計測・解析ソフトウェア O-Solution LV-0930 変位解析ソフトウェア

Specification

LV-9002 Laser Length Measuring Sensor

Detection and demodulation method Displacement demodulation by optical hetrodyne detection
Light source He-Ne laser (wavelength 632.8 nm)
Emitted light output Less than 1 mW (Class 2 JISC6802)
Measurement range Corner cube usage: ±10 m
Lens aperture diameter Φ 6 mm
accuracy ±0.2 ppm
Display
  • Interference level indicator: 10-segment LED bar
  • Laser status indicator: Red LED lights up during warm-up / Green LED lights up when measurement is possible
  • Detection ERROR Indication: Red LED lights up
Sensor main mounting hole Main fixing M6×2
signal cable
(RR-0030)		 Length: 3m (Cable outer sheath: Heat-resistant and oil-resistant PVC, black)
Weight 2.6 kg
Outline drawings 83.5 (W) x 218 (D) x 85 (H) mm

Outline drawings

LV-9300A Laser Length Meter

Monitor output
* Interference level is converted to voltage output		 Analog output: 0-10 V
Output impedance: 50 Ω or less
Output terminal: BNC (CO2 type)
Display
  • Interference level indicator: 20-segment LED bar
  • Laser status indicator: Red LED during warm-up / Green LED when ready to measure
  • ERROR display: Red LED lights up when a measurement error occurs.

LV-0121A Digital Displacement Meter (when used in conjunction with LV-9300A)

Analog output Analog output ±10 V (with input impedance of 100 kΩ or higher)
Cutoff frequency DC: DC to 100 kHz (fc = −3 dB)
AC: 0.3 Hz to 100 kHz (fc = −3 dB)
linearity ±0.1 %/FS (Temperature coefficient: ±0.025 %/FS/°C)
Analog Ripple 2 mVp-p or less
Output Impedance 50 Ω (Minimum input impedance 100 kΩ or higher)
Output terminals CO2 type (BNC)
Analog displacement range Maximum measurement speed 5.0 m/s (all ranges)
Range display The selected range is displayed on a 7-segment LED.
Setting range
range maximum
Measurement range		 analog
minimum resolution		 digital
resolution
0.1 μm/V ±1 μm 0.15 nm 0.155 nm
1 μm/V ±10 μm 0.3 nm
5 μm/V ±50 μm 1.5 nm
10 μm/V ±100 μm 3 nm
100 μm/V ±1 mm 30 nm
2 mm/V ±20 mm 618 nm
0.1 m/v ±1.0 m 30 μm
0.5 m/v ±5.0 m 154 μm
1 m/V ±10 m 309 μm
Range over display Red LED lights up when each range is above 100%.
Reset display Green LED lights up when displacement zero reset operation/input is performed.
Sampling Frequency Analog output: Fixed at 1 MHz
Digital output: Adjustable using displacement analysis software (LV-0930).
(1 MHz, 500 kHz, 200 kHz, 100 kHz, 50 kHz, 20 kHz, 10 kHz, 5 kHz, 2 kHz, 1 kHz, 500 Hz, 200 Hz, 100 Hz, 50 Hz, 20 Hz, 10 Hz, 5 Hz, 2 Hz, 1 Hz, 0.5 Hz)
Digital output USB Ver. 2.0 (Full Speed)
Connector type: Mini B type
EXT signal input Displacement zero reset signal input / TRIG signal input
Connector type: R03-R5F
  • External reset signal: RESET operation when a voltage-free normally open (a) contact signal is input/closed.
  • TRIG signal: TTL (+5V signal)
    *Available when using LV-0930
Pin assignment
A External reset signal input
B External reset signal COM
C TRIG signal input
D TRIG signal COM
E N.C.
SYNCHRONOUS signal input/output Synchronization connector
(When two devices are connected)		 RESET signal
CLK signal
TRIG signal
Outline drawings 58 (W) x 222 (D) x 135 (H) mm
Weight Approximately 1.6 kg

General specifications (including digital displacement meter LV-0121A)

Power supply used AC 100-240 V 50/60 Hz
Power consumption 60-105 VA (1-channel measuring instrument)
100-140 VA (2-channel measuring instrument)
Operating Temperature Range 5-40℃
Operating humidity range 30-80% RH (non-condensing)
Storage temperature range -10 to 50°C
Weight 1-channel measuring instrument: Approximately 6.5 kg
2-channel measuring instrument: Approximately 8.0 kg
Outline drawings 1-channel measuring instrument: 325 (W) x 222 (D) x 135 (H) mm (excluding protrusions)
2-channel measuring instrument: 378 (W) × 222 (D) × 135 (H) mm (excluding protrusions)

Outline drawings
Applicable standards Laser safety IEC 60825-1:2007:2014
EN 60825-1:2007:2014/A11:2021
FDA (CDRH) 21CFR 1040.10 and 1040.11 except for conformance with IEC 60825-1 Ed.3., as described in Laser Notice No. 56
CE marking Low Voltage Command 2014/35/EU Standard EN 61010-1
EN 60825-1
EMC directive 2014/30/EU Standard EN 61326-1
RoHS Directive 2011/65/EU Standard EN IEC 63000

Option

LV-0930 Displacement Analysis Software

The LV-0930 displacement analysis software allows you to analyze the dynamic behavior of a measured object from movement to stopping with a maximum sampling rate of 1 MHz. In addition to measuring the object's displacement (m), movement velocity (m/s), and acceleration (m/s²), it can also measure overshoot and undershoot, and by using two sensors, it can analyze pitching and yawing differentially and diffractically.
Furthermore, it's easy to display ±% graphs that show what percentage of the target speed the constant speed control is within.

LV-0930 Displacement Analysis Software

List of main unit and options

Product name Model name Purpose
Laser length measuring sensor LV-9002 Laser emission and detection (Signal cable RR-0030 3 m included)
Laser length measuring instrument LV-9300A Main unit
Digital displacement sensor LV-0121A Use with LV-9002 when adding sensors (return of the original unit is required when adding sensors).
Corner Cube
(One of these is required)		 LV-0801 It is attached to the object to be measured, and the laser light is reflected off the sensor head.
(Φ4 mm mass 0.2 g or less)
LV-0802 It is attached to the object to be measured, and the laser light is reflected off the sensor head.
(Φ10 mm, mass 2 g or less)
Alignment jig LV-0822A It facilitates the alignment of the target's movement axis with the laser beam.
Right-angle mirror LV-0965 The laser beam is bent 90° to align with the target's axis of movement.
(A jig/stand for suspending the mirror is required separately.)
Displacement analysis software LV-0930 This is digital analysis software for various amplitudes, including displacement.
Reset switch box LV-0125 Remote origin reset and trigger input via BNC terminals are possible.
(Cable length: 3 m)
Storage trunk
(For 1-channel sets)		 LV-0320 Laser length measuring sensor LV-9002 x 1
Laser length meter LV-9300A x 1
Digital displacement meter LV-0121A x 1
Alignment jig LV-0822A x 1
Cable set
Storage trunk
(For 2ch sets)		 LV-0330 Laser length measuring sensor LV-9002 x 2
Laser length meter LV-9300A x 1
Digital displacement meter LV-0121A x 2
Alignment jig LV-0822A x 2
Cable set
Wax for acceleration detectors NP-0010 This is a wax for bonding corner cubes (LV-0801/LV-802) that offers both strong adhesive power and ease of attachment and removal.
Large tripod This is used for installing sensor heads in locations where a surface plate is not available.
Laser length measuring instrument synchronization cable (made to order) DR-0703 Long Type (Required for 3 or more channels) (600 mm)
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最終更新日:2025/09/03