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Laser Length Measurement System
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LV-9002/LV-9300A/LV-0121A

LV-9002
LV-9002
LV-9002 / LV-9300A / LV-0121A
LV-9002 / LV-9300A / LV-0121A

The LV-9002/LV-9300A is a high-precision, high-speed response non-contact length measurement system that uses He-Ne laser light to measure linear displacement.
 
With a simple configuration that includes an interferometer, high-speed response of 5 m/s, and high-speed sampling of up to 1 MHz, it can perform high-precision positioning measurement and analysis for OA equipment such as printers, scanners, and copiers, as well as for machines with precision and high-speed positioning mechanisms like machine tools and moving stages.
 
By using a micro corner cube weighing less than 0.2 g, the movement of small ultrasonic linear actuators can achieve higher precision analysis and evaluation than ever before, minimizing errors due to mass load.
 
Additionally, by using the LV-0930 displacement analysis software, it is possible to analyze the dynamic behavior that occurs when the measurement target moves and stops at a maximum sampling rate of 1 MHz. In addition to the target's displacement (m), speed (m/s), and acceleration (m/s2), measurements of overshoot and undershoot can be taken, and by using two sensors, pitching and yawing analysis can be performed in differential and differential measurements. It is also easy to display graphs showing how close the constant speed control is to the target speed within a certain percentage ±% graph.
 
The laser length measurement system consists of the following three units:
・LV-9002 Sensor
・LV-9300A Laser Length Meter
・LV-0121A Digital Displacement Meter
By combining these, it can be configured as a 1ch length meter or as a 2ch length meter for pitching & yawing or differential measurement systems.

Features

  • Simple structure of an integrated interferometer

  • Maximum 5 m/s, 1 MHz sampling, high-speed response.

  • The super lightweight corner cube (below 0.2 g / 2.0 g) reduces the impact of mass load.

  • The displacement output comes standard with both digital and analog options, allowing for simultaneous observation with other signals.

  • Combining with the LV-0930 displacement analysis software, simultaneous conversion from displacement to velocity to acceleration is also easy.

Introduction video for LV-9002/LV-9300A/LV-0121A (YouTube)

Measurement of dynamic characteristics of high-speed chip mounters and dispenser heads.

The minimum corner cube used with the laser measuring devices LV-9002/LV-9300A has a very small mass of less than 0.2 g. This allows for minimizing the forces generated by the acceleration of the corner cube when the measurement target operates or stops. It enables high-precision evaluation of high-speed equipment such as chip mounters and dispenser heads.

  • High-speed chip mounter and dispenser head dynamic characteristics measurement No.1
  • High-speed chip mounter and dispenser head dynamic characteristic measurement No.2

Dynamic characteristic analysis in digital and analog.

The LV-9002/LV-9300A/LV-0121A is equipped with analog displacement output at a 1 MHz sampling rate, in addition to digital data analysis using the LV-0930 displacement analysis software. It allows for synchronized evaluation with other detectors such as measurement microphones, accelerometers, and current probes that are attached to the measurement target to assess displacement values (m).

  • Dynamic characteristic analysis in digital and analog.

Measurement of Pitching and Yawing

By using two laser length measurement sensors, it is possible to evaluate the slight differences in angles, displacements, speed, and acceleration that occur during the operation of the stage, such as pitching and yawing. Additionally, differential evaluation against arbitrary parts is also possible.

  • Pitching measurement using two units of laser length measurement sensor LV-9002 with two-axis measurement.
    Pitching measurement using two units of laser length measurement sensor LV-9002 with two-axis measurement.

System Configurations

System Configurations

音響振動解析システム O-Solution DS-5000 FFTアナライザー CF-9200A / CF-9400A データレコーダー DR-7100 計測・解析ソフトウェア O-Solution LV-0930 変位解析ソフトウェア

Specifications

LV-9002 Laser Measuring Sensor

Demodulation method Displacement demodulation by optical heterodyne detection
Light source He-Ne laser (wavelength 632.8 nm)
emitted light output Less than 1 mW (Class 2 JISC6802)
Measurement range Corner cube usage: ±10 m
lens aperture diameter Φ 6 mm
Accuracy ±0.2 ppm
display
  • Interference Level Display: 10 Segment LED Bar
  • Laser status indication: Red LED lights up during warm-up / Green LED lights up when measurement is possible.
  • Detection ERROR display: Red LED lit
Main sensor fixed hole Main fixing M6×2
Signal Cable
(RR-0030)
Length 3m (Cable outer sheath: heat-resistant and oil-resistant PVC, black color)
Weight 2.6 kg
Outline Dimensions 83.5 (W) × 218 (D) × 85 (H) mm

Outline Dimensions

LV-9300A Laser Length Measuring Instrument

Monitor Output
※Interference Level to Voltage Output
Analog output: 0 to 10 V
Output impedance: 50 Ω or less
Output terminal: BNC (CO2 type)
display
  • Interference Level Display: 20 Segment LED Bar
  • Laser status display: red LED during warm-up / green LED when measurement is possible.
  • ERROR indicates: Red LED lights up during measurement error.

LV-0121A Digital Displacement Gauge (when used in conjunction with LV-9300A)

Analog Output Analog Output ±10 V (with an input impedance of 100 kΩ or more)
cut-off frequency DC: DC~100 kHz (fc = −3 dB)
AC: 0.3 Hz~ 100 kHz (fc = −3 dB)
linearity ±0.1%/F.S (Temperature coefficient: ±0.025%/F.S/°C)
Analog Ripple Below 2 mVp
output impedance 50 Ω (minimum input impedance of 100 kΩ or more)
Output Connector CO2 Type (BNC)
analog displacement range maximum measurement speed 5.0 m/s (full range)
Range display Display the selection range on a 7-segment LED.
setting range
range Maximum
Measurement Range
Analog
Minimum resolution
Digital
Resolution
0.1 μm/V ±1 μm 0.15 nm 0.155 nm
1 μm/V ±10 μm 0.3 nm
5 micrometers per volt ±50 micrometers 1.5 nm
10 micrometers per volt ±100 micrometers 3 nm
100 μm/V ±1 mm 30 nm
2 mm/V ±20 mm 618 nm
0.1 m/v ±1.0 m 30 micrometers
0.5 m/v ±5.0 m 154 micrometers
1 m/V ±10 m 309 μm
Range Over Display Red LED lights turn on at over 100% in each range.
Reset display Zero displacement reset operation - green LED lights up during input.
sampling frequency Analog output: 1 MHz fixed
Digital output: variable via displacement analysis software (LV-0930)
(1 MHz, 500 kHz, 200 kHz, 100 kHz, 50 kHz, 20 kHz, 10 kHz, 5 kHz, 2 kHz, 1 kHz, 500 Hz, 200 Hz, 100 Hz, 50 Hz, 20 Hz, 10 Hz, 5 Hz, 2 Hz, 1 Hz, 0.5 Hz)
digital output USB Ver. 2.0 (Full Speed)
Connector type: Mini B type
EXT signal input Zero displacement reset signal input / TRIG signal input
Connector type: R03-R5F
  • External reset signal: No voltage a contact signal input / RESET operation upon closure.
  • TRIG signal: TTL (+5V signal)
    *Available when using LV-0930
Pin Assign
A External reset signal input
B External Reset Signal COM
C Trigger Signal Input
D TRIG signal COM
E N.C.
SYNCHRONOUS
signal input and output
Sync Connector
(when connecting 2 devices)
RESET signal
CLK signal
TRIG signal
Outline Dimensions 58 (W) × 222 (D) × 135 (H) mm
Weight approximately 1.6 kg

General specifications (including digital displacement gauge LV-0121A)

Use power AC 100-240 V 50/60 Hz
Power consumption 60 ~ 105 VA (1 channel measuring device)
100 ~ 140 VA (2 channel measuring device)
Operating temperature range 5 to 40 °C
Operating Humidity Range 30 to 80 % RH (without condensation)
Storage Temperature Range −10 to 50 °C
Weight 1-channel measuring device: approximately 6.5 kg
2-channel measuring device: approximately 8.0 kg
Outline Dimensions 1-channel measuring device: 325 (W) × 222 (D) × 135 (H) mm (excluding protrusions)
2-channel measuring device: 378 (W) × 222 (D) × 135 (H) mm (excluding protrusions)

Outline Dimensions

Applicable Standards Laser safety IEC 60825-1:2007:2014
EN 60825-1:2007:2014/A11:2021
FDA (CDRH) 21CFR 1040.10 and 1040.11 except for conformance with IEC 60825-1 Ed.3., as described in Laser Notice No. 56.
CE marking Low Voltage Directive 2014/35/EU Standard EN 61010-1
EN 60825-1
EMC instruction 2014/30/EU Standard EN 61326-1
RoHS Directive 2011/65/EU Standard EN IEC 63000

Options

LV-0930 Displacement Analysis Software

By using the LV-0930 displacement analysis software, you can analyze the dynamic behavior that occurs when the measurement target moves to a stop at a maximum sampling rate of 1 MHz. In addition to the target's displacement (m), velocity (m/s), and acceleration (m/s²), you can measure overshoot and undershoot, and by using two sensors, you can analyze pitching and yawing in differential and differential terms.
You can also easily display graphs showing within what percentage of the target speed the constant speed control is operating, such as a ±% graph.

LV-0930 Displacement Analysis Software

List of main unit and options

Product name Model name use
Laser Length Measuring Sensor LV-9002 Laser radiation, detection (includes signal cable RR-0030, 3 m)
Laser length measuring device LV-9300A substance
digital displacement gauge LV-0121A Used in conjunction with the LV-9002 when expanding sensors (retrieval is required during sensor expansion).
Corner cube
(one is needed)
LV-0801 Attach to the measurement target and reflect the laser light to the sensor head.
(Φ4 mm mass less than 0.2 g)
LV-0802 Attach to the measurement target and reflect the laser light to the sensor head.
(Φ10 mm mass less than 2 g)
Alignment jig LV-0822A It facilitates the alignment of the target's movement axis and the laser light.
right angle mirror LV-0965 The laser beam is bent 90° to align with the target's moving axis.
(A fixture or stand for suspending the mirror is required separately.)
displacement analysis software LV-0930 This is software for digital analysis of various amplitudes that include displacement.
Reset Switch Box LV-0125 It is possible to reset the origin from a distance and trigger input via the BNC connector.
(Cable length: 3 m)
Storage trunk
(for 1ch set)
LV-0320 Laser distance measuring sensor LV-9002×1
Laser distance measuring device LV-9300A×1
Digital displacement gauge LV-0121A×1
Alignment fixture LV-0822A×1
Complete set of cables
Storage trunk
(for 2ch set)
LV-0330 Laser distance measuring sensor LV-9002 x 2
Laser distance measuring device LV-9300A x 1
Digital displacement gauge LV-0121A x 2
Alignment fixture LV-0822A x 2
Complete set of cables
wax for accelerometer detectors NP-0010 This is a wax for adhesion used for corner cubes (LV-0801/LV-802) that balances adhesive capability and ease of attachment and detachment.
large tripod It is used for installing a sensor head in a location without a fixed base.
Cable for laser distance measuring device synchronization (made to order) Long type of DR-0703 (required when there are 3 or more channels) (600 mm)

最終更新日:2025/09/03