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Capacitive non-contact thickness gauge
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CL-5610シリーズ

Connection configuration of CL-5610 / CL-5610S

The CL-5610/CL-5610S are non-contact thickness gauges that measure the thickness of conductors, semiconductors, and insulators by connecting to VE series gap detector sensors. Up to two VE series sensors can be connected. They can also be used as 2-channel gap gauges. The CL-5610 has a built-in sensor amplifier, and the VE sensor is connected directly to the thickness gauge body. It is suitable for offline measurements on a desktop (the cable between the sensor and body is 1.5 m and cannot be extended). The CL-5610S has an external, independent sensor amplifier, and the VE sensor and thickness gauge body are used separately. The cable length between the body and the external amplifier is 2.5 m as standard, and can be extended up to 10 m with options. It is suitable for installations where the sensor and thickness gauge body need to be separated, such as integration into equipment.

Features

Numerous measurement items

It can measure thickness and gap. Additionally, it can display calculated values for each, including standard deviation, maximum value, minimum value, and maximum width (maximum - minimum).

In addition to conductors and semiconductors, the thickness of insulators can also be measured.

The CL-0300's insulating material measurement function (optional) allows you to measure the thickness of insulating materials such as thin plastic films and glass plates.

Even samples that do not have complete conductivity can be measured with stable thickness.

When holding a sample on a table coated with a fluorine-based film, it was difficult to ensure electrical conductivity between the sample and the main unit (common). Previously, stability had to be ensured by contacting the sample over a large area, but the CL-0210 high-impedance grounding mode function (optional) allows for a reduction in that area. Furthermore, higher stability can be ensured within the same area.

The high-resolution calculation function option (CL-0200) achieves a minimum display resolution of 0.02 μm. *1

*1 When using VE-2011/VE-5010/VE-5011. Applies to VE-5010/VE-5011 when the measurement range is set to 20-200 μm using the CL-0201 measurement range change option.

Up to 6 different sensor calibration values can be saved.

The CL-5610 series can store up to six sets of sensor calibration information, allowing you to select and use the optimal sensor according to your measurement range and resolution.

It is possible to continuously acquire data into a PLC or PC.

Three types of data output functions are available: analog voltage output, BCD output, and RS-232C. You can select the output that best suits your recording device. Analog and BCD outputs allow you to retrieve data at a data update interval of 20 ms. By measuring while moving the sample, you can also measure continuous thickness values necessary for detecting thickness variations in sheets.

*Analog output requires the output function option (CL-0110), and BCD output requires the BCD output function option (CL-0120).

This device can be controlled externally.

For automated measurement on manufacturing and inspection lines, it is necessary to control this device externally. The CL-5610 comes standard with contact control terminals and an RS-232C terminal, allowing for easy control from a PLC or PC.

The comparator function (when the CL-0110 output function option is installed) allows for online monitoring of abnormal values.

Example of measurement sample

Conductors and Semiconductors insulator
Silicon wafers, steel plates, aluminum plates, hard disks, printed circuit boards, and other metal plates that require cleanliness, are soft, have a mirror finish, or are easily scratched. Glass, polyethylene, polypropylene, and other plastics.
(The objects to be measured are thin objects composed of a single material with uniform properties throughout.)

*For measurements of intermediate materials and composite materials in addition to the above measurement samples, please contact us.

Case Studies

When measuring conductors and semiconductors

When measuring conductors and semiconductors

Two sensors and the object to be measured are placed parallel to each other within the sensor measurement range, and this sensor spacing (Gs) is set in the CL-5610 series. The object to be measured is inserted between sensors A and B, and the gap (Ga, Gb) between each sensor and the object is measured to determine the thickness (t).

When measuring insulators (optional)

When measuring insulators (optional)

The sensor and conductor (reference floor) are set parallel to each other, and the sensor's gap measurement (voltage output Gs at this time) is set in the CL-5610 series. When the object to be measured is inserted between the sensor and the conductor (reference floor), the sensor's voltage output becomes Ga, and the thickness (t) is determined from this change in sensor voltage and the relative permittivity εr.

*The measurable thickness of the insulator should be approximately 1/3 or less of the GAP value between the sensor and the reference floor.

Non-contact thickness gauge measurement example

Examples of conductor and semiconductor measurement

  • Conductor/Semiconductor Measurement Example No. 1
  • Conductor/Semiconductor Measurement Example No. 2
  • Conductor/Semiconductor Measurement Example No. 3

Insulator measurement example (CL-0300 option installed)

  • Insulator Measurement Example (CL-0300 Option Installed) No. 1
  • Insulator measurement example (CL-0300 option installed) No. 2

Specification

Measurement target Conductors, semiconductors, insulators *1
*1 The CL-0300 insulation measurement function option is required.
Sensor input 2-channel (A, B) capacitive sensor
Measurement items

  • Thickness of the object being measured (conductor, semiconductor, insulator<option CL-0300>)

  • The gap (A) between sensor A and the object being measured (conductor, semiconductor)

  • Gap (B) between sensor B and the object being measured (conductor, semiconductor)

  • The difference between A and B (A - B)
Display mode

  • ABS: Thickness or gap expressed as an absolute value.

  • Dev: Display of the amount of change relative to the baseline value.

  • Maximum value (MAX), minimum value (MIN), and maximum value minus minimum value (RANGE) within a specified period (during START).
Compatible sensors and display resolution

When combined with the new VE series capacitive gap detector, the following display resolutions are achieved:

Sensor type Measurement range
(μm)		 Resolution (μm)
standard CL-0200 high resolution calculation function
When options are installed
VE-2011 20～200 0.1 0.02
VE-5010 50～500
20～200＊1		 0.1 0.05/0.02＊1
VE-5011
VE-1020 100～1000 0.1 0.1
VE-1021
VE-1520 150～1500 0.5 0.2
VE-3020 300～3000 1 0.5
VE-8020 800 to 8000 2 1
VE-8021

*1: The VE-5010/5011 can have its measurement range set to 20-200 μm using the CL-0201 measurement range change option. When the high-resolution option is installed in this case, the display resolution will be 0.02 μm.
*When measuring insulators, please use approximately 1/3 of the measurement range as a guideline for thickness.
For example, when using VE-1020, the thickness of the insulator will be approximately 350 μm or less.
accuracy ±0.15%/FS(Standard)
±0.12 %/FS (When the CL-0200 high-resolution calculation function option is installed <excluding VE-8020/8021>)
Accuracy guaranteed temperature range 23℃ ± 2℃
Display section Fluorescent display tube
The display of measurement results can be switched between one item (uppercase) and two items (lowercase).
Parameter settings Various parameters necessary for measurement and calculation are set in the internal memory using the keys on the control panel. These settings are retained even when the power is turned off by the power-off memory.
Sampling time 20 ms
Average Moving average: 1 to 64 times
Interface RS-232C: Enables remote control of this device and acquisition of measurement data. Printable on the DPU-414 printer (sold separately).
BCD output function
(Option: CL-0120)		 Output measurement results in 6-digit parallel BCD format.
Output method: Open collector output
Output data: Select from GAP-A, GAP-B, THICK, AB, DISP2 display values.
Data update time: 20 ms
Connection cable: AA-8207 (3 m, open on one end)
Remote function

External operations such as starting/stopping calculation functions and thickness calibration are possible.

Remote terminal pinout and input signal

A power supply Input DC 5-24V
  • If supplying more than 6V DC from an external source, insert a resistor.
B START Same function as the START key
C STOP Stop the calculation mode.
D PAUSE Same function as the PAUSE key
E CALIB Calibration using registered reference sample data for the object being measured.
  • This is only valid when measuring conductors.
  • The thickness of the reference piece for the object being measured cannot be changed.
F START STATUS It is activated when in calculation mode and calculation interruption mode.
G +5V output Outputs +5 V (MAX: 0.3 A)
H COMMON

Connect 0V

*Compatible connector: R03-PB8M (manufactured by Tajimi Musen)
SYNC function Multiple CL-5610/CL-5610S units can be operated in parallel and synchronously (up to 2 units per master unit)*1
Power supply AC 100V-240V 50/60 Hz
Operating environment (main unit only) Temperature: +23°C ± 2°C (guaranteed accuracy range), 0°C to +40°C (operating range)
Humidity: 20-80% RH (but no condensation)
Outline drawings

210 (W) x 99 (H) x 275 (D) mm (CL-5610/CL-5610S main unit, excluding protrusions)

External dimensions No. 1

56 (W) x 42.4 (H) x 122 (D) mm (for CL-5610S converter CL-0420, excluding protrusions)

External dimensions No. 2
Weight Approximately 4.2 kg (CL-5610/CL-5610S main body)
Approximately 0.5 kg x 2 (Converter CL-0420 for CL-5610S)
price CL-5610:
 

CL-5610S:
 

*1 Synchro functionality requires adjustment between devices. Please contact us separately if you require this feature.

Option

CL-0110 Output Functions (Analog Output, Comparator Output)

Analog output Number of terminals: 3 (SENSOR A, SENSOR B, A-OUT)
  • SENSOR A, SENSOR B
    Output item: GAP value of SENSOR A and SENSOR B
    (The analog output from the gap detector is output directly.)
    Output voltage: 5 V/FS (with offset function [-5 to 0 V])
    Output accuracy: ±0.25%/FS (Accuracy guarantee applies to one sensor each for A and B)
    Response frequency: DC to 4kHz
  • A-OUT
    Output options: Choose from THICK, GAP A, GAP B, or AB.
    Output voltage: -5 to 0 to +5 V
    Output accuracy: ±0.25 %/FS
    Output update interval: 20 ms
Comparator function Number of outputs: 3 (COMP1, COMP2, COMP3)
Output method: Open collector output
Settings: Upper limit and lower limit
Modes: Individual mode, and ALL mode
  • Individual mode: Functions as three independent comparators.
Comparator function The comparator contact output closes when the upper limit (UPPER) is less than the set value or the lower limit (LOWER) is greater than the set value.
  • ALL Mode: The three outputs are assigned the functions of "Upper Limit Over," "OK (Within Range)," and "Lower Limit Over."
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CL-0120 BCD output function

Output method 6-digit parallel BCD, open collector output
Output items Choose from THICK, GAP-A, GAP-B, A-B, or DISP 2.
Update interval 20 ms
Compatible Cables AA-8207 (3 m, open on one side)
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CL-0200 High-Resolution Calculation Function Option

The CL-0200 high-resolution calculation function option enhances the resolution and linearity of the VE sensor.

price  

CL-0210 High Impedance Grounding Mode Function

Stable measurements can be performed even under measurement conditions with high ground resistance.

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CL-0300 Insulator Measurement Software Option

By installing the CL-0300 insulation measurement software option, the CL-5610/CL-5610S can measure the thickness of insulation.

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CL-015 Wafer Slide Table (Made to Order)

img-cl5600-cl5610-11

The CL-015 is a simple, manual slide table for non-contact measurement of the thickness of semiconductor and conductive wafers such as silicon wafers, combining the CL-5610/CL-5610S with a VE sensor (holding part ⌀10). The wafer-holding surface has grooves to facilitate the use of vacuum suction tweezers.

Target wafers: Outer diameter: 100–150 mm, Thickness: 0.1–1 mm
In addition, we can manufacture custom tables in other dimensions such as 200 mm and 300 mm.

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VE Series Capacitive Gap Detector

Standard type

Model name VE-5010 VE-1020 VE-1520 VE-3020 VE-8020
Measurement range (μm) *1 50～500 100～1000 150～1500 300～3000 800～8000
External dimension (mm) *2 ⌀6 ⌀8 ⌀10 ⌀20 ⌀40
Cable length 1.5m (integrated cable) Sold separately: VL-1520/VL-1521 cable (1.5m)
Temperature coefficient k1=1.7×10-5, k2=3.4×10-5
Operating temperature range *3 0～+80 ℃
price          

⌀10mm Common Clamp Type

Model name VE-2011 VE-5011 VE-1021 VE-3021
Sales ended		 VE-8021
Measurement range (μm) *1 20～ 200 50～500 100～1000 300～3000 800～8000
External dimension (mm) *2 ⌀3 ⌀6 ⌀8 ⌀20 ⌀40
Cable length Sold separately: VL-1520/VL-1521 cable (1.5m)
Temperature coefficient k1=1.7×10-5, k2=3.4×10-5
Operating temperature range *3 0～+80 ℃
price       - Sales ended -
(Tax included - Sold out -)		  

*1 The measurement range refers to the maximum gap from the sensor end face to the object being measured.
*2 The measuring surface of the object being measured must have an area larger than the outer diameter of the sensor.
*3 The operating temperature range refers to the temperature range in which the sensor can function, and does not refer to the temperature range in which linearity is guaranteed.
To ensure linearity, please use at a temperature of +23°C ± 2°C.

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最終更新日:2025/09/03