High-precision measurement of conductor/semiconductor thickness and displacement, and insulator thickness.
2.5 times wider measurement range compared to conventional models
High precision, high resolution, and excellent linearity
Can also be used as a 2-channel displacement sensor.
By combining the newly developed VE series capacitive gap detector with the CL-5600 series capacitive non-contact thickness gauge, it is possible to measure the thickness and displacement of conductors (iron, aluminum, copper, various metal platings, etc.) and semiconductors (silicon wafers, etc.) with high precision. With optional additions, the thickness of insulators (glass, plastic, etc.) can also be measured with high precision. Furthermore, when used as a 2-channel displacement meter, the displacement measurements of both Ach and Bch can be displayed simultaneously.
A pair of opposing electrodes (capacitors) are formed between the VE sensor and the target surface. The capacitance of these "capacitors" is correlated with the distance between the electrodes. Since the VE sensor can measure this capacitance non-contact, it enables highly accurate measurement without applying any load to the object being measured.
At the same time, we will release the CL-5600S, which features a separate, compact signal converter. By installing this signal converter near the VE sensor, the distance between the signal converter and the display can be extended up to 10m (optional). Thus, the CL-5600S is designed to be relatively easy to integrate into equipment, such as on manufacturing lines.
