Linear stage systems, which move, stop, and position objects at a target location, are used in many fields, from the movement mechanisms of inkjet printers and scanner heads to NC-controlled machining equipment, transport equipment, and substrate and semiconductor exposure equipment. Linear stage systems have various quality requirements, including movement accuracy, movement speed, speed unevenness, and movement vibration (pitching and yawing). In recent years, there has been a growing demand for even higher precision positioning and faster movement speeds, leading to a need for high-speed, high-precision laser length measuring instruments with sub-nanometer resolution for evaluating the performance of these devices.
The newly developed laser length measuring system (LV-9002 laser length measuring sensor, LV-9300A laser length measuring meter, LV-0121A displacement unit) uses He-Ne laser light to measure linear displacements up to 5 m/s with sampling at 1 MHz and a resolution of 0.155 nm, making it a "high-precision, high-speed response" non-contact length measuring system. Because the system has a simple configuration with a built-in interferometer, it can be installed quickly and easily. Furthermore, with the LV-0930 displacement analysis software option, measurement data can be read via USB output, and dynamic characteristic analysis such as the movement trajectory of the measured object and overshoot that occurs when it stops, FFT analysis of components superimposed on the displacement, digital filtering, and positioning accuracy testing compliant with ISO230-2 required for export can be performed at a sampling frequency of 1 MHz.
The laser length measuring system consists of three units (LV-9002 sensor unit, LV-9300A laser unit, and LV-0121A displacement unit). By combining these units, it can be configured as a 1-channel or 2-channel length measuring system for pitching and yawing or differential measurement.
Simple structure with integrated interferometer
Measurement range up to ±10 m
Maximum sampling rate of 1 MHz, fast response time of 5 m/s.
The LV-0930 dynamic characteristics analysis software allows for high-speed response at a sampling frequency of 1 MHz, displaying movement trajectories, vibration trajectories, and other data graphically.
Equipped with USB 2.0 digital output as standard.
