- The laser spot diameter can be focused down to a maximum of 1.5 μm.
- Using a camera, it is possible to measure and record the laser beam irradiation status while observing it, as well as capture still images and videos of the irradiation status.
- Because it uses a laser Doppler method, displacements of 0.01 nm can be measured in the high-frequency range.
- Standard specifications allow for vibration velocity measurement from 1 Hz to 3 MHz, while special specifications allow for measurement from 1 Hz to 20 MHz.
The LV-0148 microscope unit is a micro-object vibration measurement system that combines the LV-1700 series Laser Doppler Vibrometer with the LV-0150 series objective lens. By focusing and irradiating the laser beam of the LV-1700 series Laser Doppler Vibrometer to a maximum of 1.5 μm or less, it can detect the vibration velocity of minute and microscopic objects up to 3 MHz (20 MHz with optional equipment). It is also equipped with a coaxial reflected light illumination device and a digital still camera (CCTV camera is also available), allowing for clear observation of the detected area irradiated with laser light and recording of still images and videos. Using the LV-0148, it is possible to detect the behavior of various parts of MEMS, and measure the vibration (acceleration, velocity, displacement) of piezoelectric elements and minute mechanical parts.
