Overview of Non-Contact Thickness Meter and Related Products
Using highly stable capacitive micro-displacement sensors (gap detectors), we achieve non-contact, high-precision thickness measurement. Nine types of sensors are available to choose from depending on the object being measured and its shape. By combining these with thickness gauges (CL series) and displacement gauges (VT series), you can build the optimal system for your application.
It is highly effective for measuring axial vibration and surface runout of rotating shafts such as turbines, electric motors, compressors, and machine tool spindles, as well as for measuring and controlling the thickness and width of moving objects. It has a wide range of applications, mainly in measurement and control, including measuring and monitoring displacement, deflection, and warp.
| VE-5010 VE Series Sensor (Integrated Cable) | VE-1020 VE Series Sensor (Integrated Cable) | VE-1520 VEシリーズ センサー |
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| Features Measurement range: 50–500 μm External shape: Φ6 Cable length: 1.5 m |
Features Measurement range: 100 to 1000 μm External shape: Φ8 Cable length: 1.5 m |
Features Measurement range: 150–1500 μm External shape: Φ10 Cable (optional): VL-1520/1521 (1.5 m) |
| VE-3020 VEシリーズ センサー | VE-8020 VEシリーズ センサー | |
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| Features Measurement range: 300 to 3000 μm External shape: Φ20 Cable (optional): VL-1520/1521 (1.5 m) |
Features Measurement range: 800 to 8000 μm External shape: Φ40 Cable (optional): VL-1520/1521 (1.5 m) |
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| Suitable measuring instruments VT-5200/VT-5700, CL-7100/CL-7100S |
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| VE-2011 VEシリーズ センサー | VE-5011 VEシリーズ センサー | VE-1021 VEシリーズ センサー |
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| Features Measurement range: 20–200 μm External shape: Φ3 (tip) Cable (optional): VL-1520/1521 (1.5 m) |
Features Measurement range: 50–500 μm External shape: Φ6 (tip) Cable (optional): VL-1520/1521 (1.5 m) |
Features Measurement range: 100 to 1000 μm External shape: Φ8 (tip) Cable (optional): VL-1520/1521 (1.5 m) |
| VE-8021 VEシリーズ センサー | ||
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| Features Measurement range: 800 to 8000 μm External shape: Φ40 Cable (optional): VL-1520/1521 (1.5 m) |
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| Suitable measuring instruments VT-5200/VT-5700, CL-7100/CL-7100S |
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Measurement Example 1: Monitoring of film (insulator) thickness
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Block diagram
| CL-7100 Non-Contact Thickness Meter | CL-7100S Non-Contact Thickness Meter (sensor amplifier separate type) |
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CL-0710 Sensor Amplifier
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| Measurement items Thickness: The thickness of the object being measured (conductor/semiconductor). Gap A: The gap between sensor A and the object being measured. Gap B: The gap between sensor B and the object being measured. AB: Step difference, parallelism (AB) Thickness: The thickness of the object being measured (insulator). *When CL-0740 with insulation measurement function is installed. Temperature：Temperature *When CL-0741 is equipped with temperature measurement and correction function. |
Measurement items Thickness: The thickness of the object being measured (conductor/semiconductor). Gap A: The gap between sensor A and the object being measured. Gap B: The gap between sensor B and the object being measured. AB: Step difference, parallelism (AB) Thickness: The thickness of the object being measured (insulator). *When CL-0740 with insulation measurement function is installed. Temperature：Temperature *When CL-0741 is equipped with temperature measurement and correction function. |
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Compatible sensors |
Compatible sensors VE series |
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The VT series includes the VT-5200 series (for laboratory and research use) which uses AC power only, and the compact VT-5700 series (for line and embedded systems) which uses DC ±15V only.
Additionally, the output response frequencies are available in 4kHz and 10kHz; please select the appropriate frequency based on your application.
| VT-5210 Non-Contact Displacement Meter (4 kHz) | VT-5220 Non-Contact Displacement Meter (10 kHz) | VT-5710 Non-Contact Displacement Meter (4 kHz) |
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| Features Output: 0 to 5 V / 0 to 100% FS Linearity: ±0.2%FS/ 10-100% FS Response frequency: DC to 4 kHz Monitor display: 20-segment LED Analog output offset function |
Features Output: 0 to 5 V / 0 to 100% FS Linearity: ±0.25%FS/ 10-100% FS Frequency response: DC to 10 kHz Monitor display: 20-segment LED Analog output offset function |
Features Output: 0 to 5 V / 0 to 100% FS Linearity: ±0.2%FS/ 10-100% FS Response frequency: DC to 4 kHz Monitor display: 10-segment LED |
| Power supply AC 100-240 V / 10 VA |
Power supply DC ± 15 V / 100 mA |
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| VT-5720 Non-Contact Displacement Meter (10 kHz) | ||
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| Features Output: 0 to 5 V / 0 to 100% FS Linearity: ±0.25%FS/ 10-100% FS Frequency response: DC to 10 kHz Monitor display: 10-segment LED |
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| Power supply DC ± 15 V / 100 mA |
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| Compatible sensors: VE series | ||
| VL-1520 Cable length: 1.5m (Straight-type connector on both ends) |
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| VL-1521 Cable length: 1.5m (L-shaped connector - straight type connector) |
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