Microscope unit
LV-0381
The LV-0381 is a microscope unit for Laser Doppler Vibrometer. By combining Laser Doppler Vibrometer with a microscope optical system, it can focus and irradiate laser light to ⌀2.5 µm, enabling the detection of vibrations in minute objects up to 3 MHz (20 MHz with optional equipment).
Coaxial incident illumination and two digital video cameras with different magnifications* enable quick and accurate positioning and still image recording. This allows for non-contact, high-spatial-resolution detection and evaluation of vibrations and behavior of micromachines, MEMS (Micro Electro Mechanical Systems), other small mechanical parts, piezoelectrics, small electronic devices, and microstructures.
*When the LV-0181 built-in positioning camera is attached to the LV-1800 Laser Doppler Vibrometer
