Ultra-high sensitivity, low noise, TEDS compatible 3-axis acceleration sensor NP-7320N10

Ono Ono Sokki Co., Ltd. (President: Yuji Okoshi), a manufacturer and distributor of electronic measuring instruments, began selling the "NP-7320N10," an ultra-high-sensitivity, low-noise TEDS Tri-axial Accelerometer capable of measuring floor vibrations at the nano-level, on February 7, 2024.

This product is the successor to the "3-axis Accelerometer NP7310". In recent years, semiconductors have become indispensable to our lives due to the growth of autonomous driving and cloud computing. While demand is increasing, semiconductor manufacturing sites are working to further miniaturize and mass-produce semiconductors, but the required precision has decreased from tens of nanometers to several nanometers, requiring even finer processing.

Therefore, unnecessary vibrations in the factory floor significantly affect product processing accuracy and inspection, leading to a decrease in yield rates. To ensure stable production, it is necessary to identify and address even minute vibrations that are imperceptible to human senses.

To detect these minute vibrations, we have released a successor to our previously sold 3-axis Accelerometer. Achieving the same sensitivity as the previous model (100 mV/(m/ ^s²)) and noise levels below 28 µm/ ^s² rms, it enables the measurement of nano-level vibrations required in the field. By introducing this product to the market, we will contribute to the stable supply of semiconductors.

Features

Ultra-high sensitivity and low noise / 3-axis simultaneous measurement / IP67 waterproof structure / TEDS compliant / CE compliant

Target Needs

• We want to consider appropriate locations for semiconductor manufacturing equipment and precision processing machines.
• We want to understand the vibration effects on the installation floor during manufacturing.

Equipment details

This product is a piezoelectric preamplifier-integrated TEDS ^*1 3-axis Accelerometer that achieves a sensitivity of 100 mV/(m/ ^s²) and a self-noise of 28 µm/s² ^rms or less.

Furthermore, by combining it with our portable FFT analyzer "CF-9400A," it enables real-time measurement and display of tripartite graphs ^*2 and VC curves ^*3 used for floor vibration evaluation. This allows for immediate assessment of floor vibration conditions on-site. In addition, more detailed waveform analysis, such as frequency analysis and natural frequency measurement, is possible on-site.

*1 A general term for IEEE-standardized description formats that allow for the electronic reading and writing of sensor-specific information. This information is recorded in an EEPROM built into the sensor, and these values can be read and written electronically.
*2 A graph that allows for reading the amplitude of acceleration and displacement, based on velocity, on the frequency axis.
*3 The VC curve is a widely used guideline for evaluating micro-vibrations in the fields of semiconductor manufacturing equipment and precision machinery. It has a constant velocity regardless of frequency and is divided into five stages (VC-A, VC-B, VC-C, VC-D, VC-E) in 6 dB increments.

Three points

Piezoelectric preamplifier-integrated TEDS Tri-axial Accelerometer (CE compliant, IP67 compliant)

Because it is piezoelectric and CE compliant, it is easy to import and export. Furthermore, it is IP67 compliant, so it can be used in harsh environments such as outdoors.

A simple, all-in-one system that doesn't require a sensor amplifier.

Because it is battery-powered and does not require a sensor amplifier or PC, the amount of equipment to be brought to the site is reduced, leading to improved work efficiency.

Real-time display of tripartite graphs and VC curves used in floor vibration measurement.

Because tripartite graphs and VC curves can be displayed on-site, the vibration state of the floor can be understood immediately. In addition to actual operation measurements, natural frequency measurements can also be performed by combining them with an impulse hammer, allowing for on-site analysis of vibration factors related to the equipment and the floor it is installed on.