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Evaluating MEMS and micromachines with laser light

Laser Doppler Vibrometer Microscope Unit LV-0381/LV-0383

  • Laser Doppler Vibrometer Microscope Unit LV-0381/LV-0383

The LV-0381 microscope unit and the LV-0383 three-dimensional microscope unit are optical units for Laser Doppler Vibrometer used for detecting vibrations in minute objects. They enable the detection of vibrations in MEMS (Micro Electro Mechanical Systems), piezoelectric elements, microstructures, and ultrasonically driven objects that are difficult to detect with contact methods. The LV-0381 is a single-axis microscope unit. The LV-0383 three-dimensional microscope unit uses three Laser Doppler Vibrometer to non-contactally detect vibrations occurring in three axes. Each unit can quickly and accurately position the laser beam and record still images using coaxial incident illumination and two digital video cameras with different magnifications (optional). The vibration frequency analysis range is up to 100 kHz, allowing observation of the velocity, acceleration, and displacement of vibrations occurring in the X, Y, and Z directions of the object, as well as various frequency analyses.

Vibration detection for minute objects and minute regions (LV-0383/LV-0381)

Vibration detection is possible with a laser spot diameter as small as 2.5 μm (LV-0381).
It can detect and evaluate minute objects and minute regions with high spatial resolution.

Detection of vibrations in the X, Y, and Z axes (LV-0383)

Vibration detection in three axes from 0.3 Hz to 100 kHz is possible (LV-0383).
Lateral vibrations and ultrasonic vibrations that occur in the shear direction of the piezoelectric material can also be detected.

Simultaneous observation with two field-of-view magnifications (LV-0383/LV-0381)

A 1280 x 960 size CMOS digital camera allows for precise laser beam positioning.
Furthermore, by attaching the LV-0181 built-in positioning camera (OP: VGA) to the LV-1800 Laser Doppler Vibrometer,
With two different magnification settings (large and small), you can quickly monitor the object, position the laser beam, and record images.

The information on this page is based on the information available at the time of publication.
Please note that if product sales are discontinued, organizational changes are made, or specifications are changed after publication, the information may differ from the latest information.

This page is created by an automatic translation system based on the information in the Japanese version. Details