Displacement resolution 0.1 nm, measurement range up to ±5 m
High-speed sampling up to 1 MHz
Data is output in both analog and digital formats.
Even minute objects can be easily detected with a CCD camera.
A wide range of data analysis tools support effective measurement and analysis.
Conventional vibration displacement detection primarily involved converting acceleration (m/s²) or velocity (m/s) to displacement. However, many actuators using MEMS (Micro Electro Mechanical Systems) and piezoelectric elements operate with rectangular drive or DC offset, making accurate displacement measurement impossible with conventional Accelerometer or Laser Doppler Vibrometer that rely on integral processing.
The newly developed LV-2100 laser interferometer can directly detect minute, high-speed vibrational displacements of MEMS and piezoelectric elements from DC power at 1 MHz sampling rate and a high displacement resolution of 0.155 nm, without load or contact. It boasts a minimum laser spot diameter of φ1.5 μm and high spatial resolution. Displacement strokes up to 5 m can be measured. The digital displacement output does not suffer from amplitude range-dependent resolution degradation. A wide range of hardware and software, including optional displacement analysis software (LV-0930), an FFT analyzer, and the 'Oscope/Oscope Professional' time-series analysis tool, supports more effective measurement and analysis.
